Modification of selectivity for sensing for nanostructure device arrays
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Abstract
An electronic system for selectively detecting and identifying a plurality of chemical species, which comprises an array of nanostructure sensing devices, is disclosed. Within the array, there are at least two different selectivities for sensing among the nanostructure sensing devices. Methods for fabricating the electronic system are also disclosed. The methods involve modifiying nanostructures within the devices to have different selectivity for sensing chemical species. Modification can involve chemical, electrochemical, and self-limiting point defect reactions. Reactants for these reactions can be supplied using a bath method or a chemical jet method. Methods for using the arrays of nanostructure sensing devices to detect and identify a plurality of chemical species are also provided. The methods involve comparing signals from nanostructure sensing devices that have not been exposed to the chemical species of interest with signals from nanostructure sensing devices that have been exposed to the chemical species of interest. Nanostructure sensing device array structures that can measure and subtract out environmental factors are also disclosed.
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Citations
105 Claims
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1-68. -68. (canceled)
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69. A method of fabricating a sensor for detecting a plurality of different analytes, comprising the steps of:
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forming a plurality of nanostructure sensing devices on a substrate, wherein each nanostructure sensing device comprises a nanostructure, at least two contact electrodes in electrical communication via the nanostructure and at least one structure selected from the group consisting of a protective coating disposed over the contact electrodes and a gate electrode in electrical communication with the nanostructure;
adapting individual ones of the plurality of nanostructure sensing devices for sensitivity to different ones of a plurality of analytes; and
forming signal connections to the individual ones of the nanostructure sensing devices, the signal connections adapted to transmit signals indicating a response of corresponding ones of the individual ones of the nanostructure sensing devices to the plurality of analytes. - View Dependent Claims (70, 71, 72, 73, 74, 75, 76, 77)
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78. A method of fabricating a sensor for detecting a plurality of different analytes, comprising the steps of:
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forming a plurality of nanostructure sensing devices on a substrate, wherein each nanostructure sensing device comprises a nanostructure and at least two contact electrodes in electrical communication via the nanostructure;
directing a plurality of chemical jets towards the plurality of nanostructure sensing devices, wherein the plurality of chemical jets dispense reactants; and
reacting the plurality of nanostructure sensing devices with the reactants so as to adapt different ones of the plurality of nanostructure sensing devices for sensitivity to different ones of a plurality of analytes. - View Dependent Claims (79, 80, 81, 82, 83, 84, 85, 86, 87, 88, 89, 90)
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91. A method of fabricating a sensor for detecting a plurality of different analytes, comprising the steps of:
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forming a plurality of nanostructure sensing devices on a substrate, wherein each nanostructure sensing device comprises a nanostructure and at least two contact electrodes in electrical communication via the nanostructure;
providing a plurality of counter electrodes, each of the plurality of counter electrodes adjacent to a nanostructure of the plurality of nanostructure sensing devices;
submerging the plurality of nanostructure sensing devices in an electrochemical solution;
applying a first voltage across the contact electrodes of the plurality of nanostructure sensing devices; and
applying a second voltage different from the first voltage to the plurality of counter electrodes while the first voltage is applied, so as to cause an electrochemical reaction between the electrochemical solution and nanostructures of the plurality of nanostructure sensing devices. - View Dependent Claims (92, 93, 94, 95, 96, 97)
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98. A method of fabricating a sensor for detecting a plurality of different analytes, comprising the steps of:
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forming a plurality of nanostructure sensing devices on a substrate, wherein each nanostructure sensing device comprises a nanostructure and at least two contact electrodes in electrical communication via the nanostructure;
exposing the plurality of nanostructure sensing devices to a reactant; and
forming point defects on nanostructures of the plurality of nanostructure sensing devices using the reactant. - View Dependent Claims (99, 100, 101, 102, 103, 104, 105)
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Specification