R2R controller to automate the data collection during a DOE

• US 20060079983A1
• Filed: 10/13/2004
• Published: 04/13/2006
• Est. Priority Date: 10/13/2004
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Willis, James E.
• Application Number:
  US10/962,596
• Publication Number:
  US 20060079983A1
• Time in Patent Office: Days
• US Class Current: 700/108
• CPC Class Codes: G05B 17/02 electric
• CPC Class Codes: G05B 23/0216 Human interface functionality, e.g. monitoring system providing help to the user in the selection of tests or in its configuration
• CPC Class Codes: G05B 23/0259 characterized by the response to fault detection

Abstract

A system and a computer-implemented method of operating a processing system in which a process model is selected from a menu of process models available from the processing system. In the module and method, an experiment is designed having a number of process runs for characterization of the selected process model. Process runs to collect data are executed on a processing tool coupled to the processing system. The actual process results from the process runs are measured. The process model is solved for coefficients of the process model.

Claims

1. A computer-implemented method for operation of a processing system, comprising:

receiving a selection of a process model from a menu of process models available for characterization of a processing tool of the processing system;

designing a number of process runs to characterize the selected process model on the processing tool;

directing the process runs on the processing tool to collect data for input to the selected process model;

obtaining actual process results from the process runs; and

solving for coefficients of the process model.

2. The computer-implemented method as claimed in claim 1, further comprising:

inverting the process model to determine recipe parameters required to produce a desired process result.

3. The computer-implemented method as claimed in claim 1, wherein the receiving a selection comprises:

providing for the selection at least one of a linear model, a quadratic model, and a full-quadratic model.

4. The computer-implemented method as claimed in claim 3, wherein the providing for the selection comprises:

providing a drop down list of at least one of the linear model, the quadratic model, and the full-quadratic model.

5. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

defining process runs in which at least one process parameter is varied by a set amount about a nominal operating point during each process run.

6. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining at least one process model parameter in the process model.

7. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining a minimum number of runs for solution of the coefficients.

8. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining one more than a minimum number of runs for solution of the coefficients.

9. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining two more than a minimum number of runs for solution of the coefficients.

10. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining three more than a minimum number of runs for solution of the coefficients.

11. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining one more than the minimum number of runs for a solution that is tolerant to one missing run.

12. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining two more than the minimum number of runs for a solution that is tolerant to one missing run.

13. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

determining three more than the minimum number of runs for a solution that is tolerant to one missing run.

14. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

selecting from a displayed recipe field at least one recipe from a list of recipes for the processing tool.

15. The computer-implemented method as claimed in claim 14, wherein the selecting at least one recipe comprises:

selecting a refresh button to obtain current recipe information for the processing tool.

16. The computer-implemented method as claimed in claim 1, wherein the designing comprises forming a design of experiment (DOE) control strategy having at least one DOE control plan, and

wherein the directing comprises executing the at least one DOE control plan.

17. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

forming a design of experiment (DOE) control strategy by downloading a plurality of control plans; and

displaying stored control plans for user selection and editing.

18. The computer-implemented method as claimed in claim 17, further comprising:

displaying a navigation tree having sublevels of the stored control plans.

19. The computer-implemented method as claimed in claim 17, further comprising:

on-display editing of a selected one of the displayed control plans.

20. The computer-implemented method as claimed in claim 1, further comprising:

displaying on at least one graphical user interface (GUI) screen at least one of a DOE control strategy screen, a DOE control plan screen, a recipe range screen, a process recipe screen, or a status screen, or a combination thereof.

21. The computer-implemented method as claimed in claim 1, wherein the designing a number of process runs and the directing the process runs comprise:

obtaining process recipes; and

sending the process recipes to the processing system.

22. The computer-implemented method as claimed in claim 1, wherein the designing comprises:

forming a DOE data collection plan for a required number of process runs; and

collecting data specified by the DOE data collection plan.

23. The computer-implemented method as claimed in claim 22, further comprising:

executing a DOE data analysis plan on the collected data.

24. The computer-implemented method as claimed in claim 23, further comprising:

determining if the collected data is correct; and

determining if a sufficient amount of data has been collected for solution of the coefficients.

25. The computer-implemented method as claimed in claim 23, wherein the forming a DOE data collection plan comprises:

providing an editable field in a graphics unit interface for entry of a DOE collection plan name.

26. The computer-implemented method as claimed in claim 25, further comprising:

providing a dropdown list of system recipes for the processing tool to be associated with the DOE collection plan name.

27. The computer-implemented method as claimed in claim 1, further comprising:

solving a set of equations associated with the process runs such that, for said set of equations, an equation is established for each of the process runs and process model coefficients are used as the variables in the set of equations.

28. The computer-implemented method as claimed in claim 1, further comprising:

executing the process model to predict a process result.

29. The computer-implemented method as claimed in claim 1, further comprising:

displaying a multi-dimensional graph of the process model.

30. The computer-implemented method as claimed in claim 1, wherein the directing comprises:

directing the process runs in at least one of an etching module, a deposition module, a polishing module, a coating module, a developing module, a thermal treatment module, and a combination of two or more thereof.

31. A computer readable medium containing program instructions for execution on a computer system, which when executed by the computer system, cause the computer system to perform any one of the steps of claims 1-30.

37. The processing system as claimed in claim 24, wherein the controller comprises:

means for displaying a multi-dimensional graph of the process model.

32. A processing system comprising:

a processing module; and

a controller coupled to the processing module, wherein the controller comprises means for performing a substantially automatic design of experiments (DOE) procedure,

said means for performing a substantially automatic DOE procedure including,

means for selecting a process model,

means for designing an experiment to collect process data using the selected process model,

means for collecting the data when the number of process runs are performed, and

means for determining coefficients for the selected process model using the collected data.

33. The processing system as claimed in claim 32, wherein the controller comprises a DOE control strategy and means for executing the DOE control strategy, and

wherein the DOE control strategy comprises a DOE control plan and the controller comprises means for executing the DOE control plan.

34. The processing system as claimed in claim 32, wherein the controller comprises a DOE control strategy and a means for executing the DOE control strategy, and

wherein the DOE control strategy comprises a DOE data collection plan and the controller comprises means for executing the DOE collection plan.

35. The processing system as claimed in claim 32, wherein the controller comprises a DOE control strategy and means for executing the DOE control strategy, and

wherein the DOE control strategy comprises a DOE analysis plan and the controller comprises means for executing the DOE analysis plan.

36. The processing system as claimed in claim 32, wherein the means for determining the model coefficients comprises:

means for solving a set of equations such that an equation is established for each process run and the model coefficients are used as the variables in the set of equations.

38. The processing system as claimed in claim 32, wherein the controller comprises:

means for executing the process model to predict a process result.

39. The processing system as claimed in claim 32, wherein the controller comprises:

means for creating process recipes and sending the process recipes to the processing module.

40. The processing system as claimed in claim 32, wherein the controller comprises means for displaying a plurality of graphical user interface (GUI) screens, and

wherein the GUI screens comprise a DOE control strategy screen, a DOE control plan screen, a recipe range screen, a process recipe screen, or a status screen, or a combination thereof.

41. The processing system as claimed in claim 32, wherein the processing module comprises an etching module, a deposition module, a polishing module, a coating module, a developing module, or a thermal treatment module, or a combination of two or more thereof.

42. A computer-directed system for performing design of experiments techniques on a processing tool, comprising:

a selection device having a menu of process models available for selection;

a process controller coupled to the processing tool for control of the processing tool, and configured to receive from the selection device a selected process model, said process controller including a memory storing a determination algorithm for determination of a number of process runs required for characterization of the selected process model on the processing tool;

a receiver configured to receive process data from executed process runs; and

a data processor configured to receive the process data and solve for coefficients of the process model.

43. The computer-directed system as claimed in claim 42, wherein the memory in the process controller comprises:

an inverter algorithm for inversion of the process model to determine recipe parameters for a desired process result.

44. The computer-directed system as claimed in claim 42, wherein the determination algorithm comprises:

an algorithm for definition of process runs in which at least one process parameter is varied by a set amount about a nominal operating point during each process run.

45. The computer-directed system as claimed in claim 42, wherein the process model comprises:

at least one of a linear model, a quadratic model, and a full-quadratic model.

46. The computer-directed system as claimed in claim 45, wherein the selection device comprises:

a drop down list of at least one of the linear model, the quadratic model, and the full-quadratic model.

47. The computer-directed system as claimed in claim 42, wherein the selection device comprises:

a display configured to display a recipe field of at least one recipe from a list of recipes for the processing tool.

48. The computer-directed system as claimed in claim 42, further comprising:

a refresh button configured upon activation to obtain current recipe information for the processing tool.

49. The computer-directed system as claimed in claim 42, wherein the memory in the process controller comprises:

a design of experiments (DOE) control strategy; and

a DOE control plan for execution of the DOE control strategy on the process tool.

50. The computer-implemented system as claimed in claim 49, further comprising:

a display configured to display a navigation tree having sublevels of DOE control plans.

51. The computer-directed system as claimed in claim 42, wherein the memory in the process controller comprises:

a design of experiments (DOE) collection plan; and

a DOE control plan for execution of the DOE collection plan on the process tool.

52. The computer-directed system as claimed in claim 51, further comprising:

a display configured to display an editable field for entry of a DOE collection plan name.

53. The computer-directed system as claimed in claim 51, further comprising:

a display configured to display a dropdown list of system recipes for the processing tool to be associated with the DOE collection plan name.

54. The computer-directed system as claimed in claim 42, wherein the data processor comprises:

a memory having a solution algorithm for solution of a set of equations associated with each process run, the algorithm including model coefficients to be used as variables in the set of equations.

55. The computer-directed system as claimed in claim 42, further comprising:

a display configured to display a multi-dimensional graph of the process model.

56. The computer-directed system as claimed in claim 42, wherein the process controller is configured to execute the process model to predict a process result.

57. The computer-directed system as claimed in claim 42, further comprising:

a graphical user interface (GUI) screen configured to display a DOE control strategy screen, a DOE control plan screen, a recipe range screen, a process recipe screen, or a status screen, or a combination thereof.

58. The computer-directed system as claimed in claim 42, wherein the processing tool comprises:

at least one of an etching module, a deposition module, a polishing module, a coating module, a developing module, and a thermal treatment module.