Inline connection setting method and device and substrate processing devices and substrate processing system
First Claim
1. An inline connection setting method for automatically setting connection between apparatuses which perform an inline process on an object to be processed, comprising steps of:
- causing a first processing apparatus to request a second processing apparatus, connected inline to said first processing apparatus, to transfer profile information which is information relating to said second processing apparatus;
causing said first processing apparatus to receive said profile information from said second processing apparatus; and
causing said first processing apparatus to select a software file to be used in said first processing apparatus, in association with said profile information.
1 Assignment
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Accused Products
Abstract
It at least includes a step at which a coating and developing apparatus requests an exposure apparatus, connected inline thereto, to transfer profile information which is information relating to the exposure apparatus, a step at which the coating and developing apparatus receives the profile information from the exposure apparatus, and a step at which the coating and developing apparatus selects a software file to be used in the coating and developing apparatus, in association with the profile information.
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Citations
33 Claims
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1. An inline connection setting method for automatically setting connection between apparatuses which perform an inline process on an object to be processed, comprising steps of:
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causing a first processing apparatus to request a second processing apparatus, connected inline to said first processing apparatus, to transfer profile information which is information relating to said second processing apparatus;
causing said first processing apparatus to receive said profile information from said second processing apparatus; and
causing said first processing apparatus to select a software file to be used in said first processing apparatus, in association with said profile information. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. An inline connection setting apparatus for automatically setting connection of a second processing apparatus to a first processing apparatus which performs an inline process on an object to be processed, comprising:
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first memory means having a connection-state checking section which checks connection for information communication with said second processing apparatus, connected inline to said first processing apparatus, an information acquisition section which requests said second processing apparatus to transfer profile information relating to said second processing apparatus and receives said profile information, and a file selecting section which selects a software file to be used in association with said profile information; and
control means for executing a program stored in said first memory means. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15, 16)
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17. A substrate processing apparatus which performs an inline process on a substrate in cooperation with a partner apparatus, comprising:
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a processing section which performs an inline process on the substrate;
a substrate transfer mechanism which transfers the substrate between said processing section and said partner apparatus;
a first communication interface which performs information communication with the partner apparatus for performing said inline process on the substrate;
a second communication interface which communicates software information with the partner apparatus;
information acquisition means which acquires profile information relating said partner apparatus from the partner apparatus via the second communication interface;
software-file memory means which stores a plurality of software files for controlling an operation of said substrate said substrate processing apparatus; and
file selecting means which selects, from said software-file memory means, a software file for controlling the operation of the said substrate processing. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
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25. A substrate processing system comprising a first processing apparatus which performs an inline process on an object to be processed, and a second processing apparatus, wherein
said first processing apparatus comprising a connection setting section having: -
first memory means having a connection-state checking section which checks connection for information communication with said second processing apparatus, connected inline, an information acquisition section which requests said second processing apparatus to transfer profile information relating to said second processing apparatus and receives said profile information, and a file selecting section which selects a software file to be used in association with said profile information; and
control means for executing a program stored in said first memory means. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33)
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Specification