PRESSURE SENSOR WITH LAMINATED MEMBRANE
First Claim
1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
- a chamber partially defined by a flexible membrane, the flexible membrane is a laminate having at least two layers wherein at least one of the layers is at least partially formed from conductive material, and the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects from any pressure difference between the reference pressure and the fluid pressure; and
, associated circuitry for converting deflection of the flexible membrane into an output signal indicative of the fluid pressure.
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Accused Products
Abstract
A pressure sensor (30) for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber (58) partially defined by a flexible membrane (50), the flexible membrane (50) is a laminate having at least two layers wherein at least one of the layers is at least partially formed from conductive material, and the chamber (58) containing a fluid at a reference pressure, such that the flexible membrane (50) deflects from any pressure difference between the reference pressure and the fluid pressure; and,
- associated circuitry (34) for converting deflection of the flexible membrane (50) into an output signal indicative of the fluid pressure.
Forming the membrane from a number of separately deposited layers alleviates internal stress in the membrane (50). The layers can be different materials specifically selected to withstand harsh environments.
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Citations
43 Claims
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
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a chamber partially defined by a flexible membrane, the flexible membrane is a laminate having at least two layers wherein at least one of the layers is at least partially formed from conductive material, and the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects from any pressure difference between the reference pressure and the fluid pressure; and
,associated circuitry for converting deflection of the flexible membrane into an output signal indicative of the fluid pressure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification