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PRESSURE SENSOR WITH LAMINATED MEMBRANE

  • US 20060081042A1
  • Filed: 10/18/2004
  • Published: 04/20/2006
  • Est. Priority Date: 10/18/2004
  • Status: Active Grant
First Claim
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:

  • a chamber partially defined by a flexible membrane, the flexible membrane is a laminate having at least two layers wherein at least one of the layers is at least partially formed from conductive material, and the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects from any pressure difference between the reference pressure and the fluid pressure; and

    , associated circuitry for converting deflection of the flexible membrane into an output signal indicative of the fluid pressure.

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