WAFER LEVEL MICROELECTRONIC PACKAGING WITH DOUBLE ISOLATION
First Claim
1. A microelectronic package comprising:
- (a) a microelectronic element having front and rear sides, (b) a front cover overlying the front side of said element, said front cover being spaced from said front side so as to define a front space between said front side and front cover;
(c) a rear cover overlying the rear side of said element, said rear cover being spaced from said rear side so as to define a rear space between said rear side and said rear cover; and
(d) one or more seals surrounding at least a portion of said element connecting said covers to said element, to one another or both.
2 Assignments
0 Petitions
Accused Products
Abstract
A microelectronic package may include front and rear covers overlying the front and rear surfaces of a microelectronic element such as an infrared sensor and spaces between the microelectronic element and the covers to provide thermal isolation. A sensing unit including a microelectronic package may include a reflector spaced from the front cover to provide an analyte space, and the microelectronic element may include an emitter and a detector so that radiation directed from the emitter will be reflected by the sensor to the detector, and such radiation will be affected by the properties of the analyte in the analyte space. Such a unit provides a compact, economical chemical sensor. Other packages include elements such as valves for passing fluids into and out of the spaces within the package itself.
107 Citations
42 Claims
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1. A microelectronic package comprising:
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(a) a microelectronic element having front and rear sides, (b) a front cover overlying the front side of said element, said front cover being spaced from said front side so as to define a front space between said front side and front cover;
(c) a rear cover overlying the rear side of said element, said rear cover being spaced from said rear side so as to define a rear space between said rear side and said rear cover; and
(d) one or more seals surrounding at least a portion of said element connecting said covers to said element, to one another or both. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A sensor including:
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(a) a microelectronic element having front and rear surfaces, said microelectronic element including an emitter adapted to emit radiation in a selected wavelength band forwardly from said front surface and a detector adapted to detect radiation in said band directed rearwardly to said front surface;
(b) a front cover overlying said front surface, said front cover having a window portion aligned with said emitter and detector, at least said window portion being substantially transparent to radiation in said band;
(c) a seal encircling said emitter and detector and extending rearwardly from said front cover; and
(d) one or more electrical connectors extending through said front cover, said electrical connectors being electrically connected to said microelectronic element. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A sensor comprising:
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(a) a reflector having a proximal surface and electrically conductive features, at least a portion of said proximal surface being adapted to reflect radiation in a predetermined wavelength band;
(b) a microelectronic element including an emitter and a detector mounted to said reflector so that there is an analyte space between said microelectronic element and said proximal surface of said reflector, said emitter being arranged to direct radiation in said band through said analyte space to said reflector so that said radiation will be reflected by said reflector back through said analyte space to said detector, said microelectronic element being electrically connected to said electrically conductive features of said reflector. - View Dependent Claims (30, 31, 32)
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33. A method of making a microelectronic package comprising the steps of:
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(a) assembling a front cover plate to a front side of a main wafer so that said front cover plate is spaced from said front side of said main wafer;
(b) providing front spacing elements extending between said front cover plate and said main wafer;
(c) assembling a rear cover plate to a rear side of said main wafer so that rear cover plate is spaced from said rear side of said main wafer;
(d) providing rear spacing elements extending between said rear side of said main wafer and said rear cover plate; and
(e) after said assembling and providing steps, severing said plates and wafer to form a plurality of units, each including a region of said main wafer, regions of said front and rear plates, and front and rear spacing elements connecting said regions of said plates to said region of said main wafer. - View Dependent Claims (34, 35, 36, 37, 38)
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39. A method of making a plurality of sensors including:
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(a) providing a wafer-level assembly including a main wafer having a plurality of regions, each of said regions including an emitter operative to emit light and a detector operative to detect light and a front plate at least partially transparent to said light;
(b) attaching a reflector plate to said front plate so that said reflector plate is spaced apart from said front plate and reflector spacing elements extend between said front plate and said reflector plate at spaced-apart locations; and
(c) after said providing and attaching steps, severing said assembly and said reflector plate to provide a plurality of individual units, each including a region of said main wafer, a portion of said front plate forming a front cover, a portion of said reflector plate forming a reflector, an analyte space between the reflector front cover, and a plurality of said reflector spacing elements, such analyte space being open to the exterior of the unit through spaces between the reflector spacing elements. - View Dependent Claims (40)
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41. A sensor including:
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(a) a semiconductor chip including an emitter adapted to emit radiant energy in a wavelength band in a forward direction and a detector adapted to detect radiant energy in said wavelength band; and
(b) a reflector fixed to said chip forward of said emitter and detector so that radiant energy emitted by said emitter will be reflected to said detector, and (c) a structure defining an analyte space open for passage of an analyte therethrough, said analyte space being disposed between said chip and said reflector, whereby radiant energy passing to and from said reflector will pass through analyte in said space.
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42. A sensor including:
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(a) a semiconductor chip including an emitter adapted to emit radiant energy in a wavelength band in a forward direction and a detector adapted to detect radiant energy in said wavelength band; and
(b) a reflector fixed to said chip forward of said emitter and detector so that radiant energy emitted by said emitter will be reflected to said detector, said reflector being exposed to an environmental condition in the vicinity of said sensor and having reflectivity which varies in response to said environmental condition.
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Specification