Linear motor, moving stage system, exposure apparatus, and device manufacturing method

• US 20060082225A1
• Filed: 12/01/2005
• Published: 04/20/2006
• Est. Priority Date: 02/13/2003
• Status: Active Grant

• Current Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Original Assignee: Canon Ayutthaya Limited (Canon Inc.)
• Inventors: Korenaga, Nobushige, Asano, Toshiya
• Granted Patent: US 7,348,695 B2
• Time in Patent Office: Days
• US Class Current: 310/12.60
• CPC Class Codes: G03F 7/70758 Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
• CPC Class Codes: H01J 2237/20221 Translation
• CPC Class Codes: H01J 2237/20278 Motorised movement
• CPC Class Codes: H01J 2237/3175 Lithography
• CPC Class Codes: H01J 37/20 Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support introducing the objects H01J37/18
• CPC Class Codes: H02K 1/276 Magnets embedded in the magnetic core, e.g. interior permanent magnets [IPM]
• CPC Class Codes: H02K 41/031 of the permanent magnet type

Abstract

A linear motor includes a coil and a plurality of magnets disposed along a central axis of the coil. The magnetization directions of the plurality of magnets have different tilts with respect to the central axis.

Claims

1. A linear motor, comprising:

a coil; and

a plurality of magnets disposed along a central axis of said coil, wherein magnetization directions of said plurality of magnets have different tilts with respect to the central axis.

2. A linear motor according to claim 1, wherein the magnetization directions of said plurality of magnets are tilted in opposite directions with respect to the central axis.

3. A linear motor according to claim 2, wherein said plurality of magnets are disposed so that the total sum of the tilts of the magnetization directions with respect to the central axis becomes equal to or approximately equal to zero.

4. A stage system, comprising:

a linear motor as recited in claim 1;

and

a stage to be driven by said linear motor.

5. An exposure apparatus, comprising:

a stage system as recited in claim 4, for positioning at least one of an original and a substrate; and

means for exposing the substrate with the original.

6. A device manufacturing method, comprising the steps of:

preparing an exposure apparatus as recited in claim 5;

and

producing a device by use of the exposure apparatus.

7. A linear motor, comprising:

a coil;

a plurality of first magnet groups having polar directions disposed in periodically different directions; and

a plurality of second magnet groups having polar directions disposed in periodically different directions,

wherein, in a set including a predetermined magnet of said first magnet groups and a magnet of said second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets have mutually different tilts with respect to the central axis of said coil.

8. A linear motor according to claim 7, wherein, in a set including a predetermined magnet of said first magnet groups and a magnet of said second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets are tilted in opposite directions with respect to the central axis.

9. A linear motor according to claim 8, wherein, in a set including a predetermined magnet of said first magnet groups and a magnet of said second magnet groups, corresponding to the predetermined magnet, the magnets are disposed so that the total sum of the tilts of the magnetization directions of the magnets become equal to or approximately equal to zero.

10. (canceled)

11. (canceled)

12. A stage system, comprising:

a stage; and

a linear motor including (i) a coil, (ii) a plurality of first magnet groups having polar directions disposed in periodically different directions, and (iii) a plurality of second magnet groups having polar directions disposed in periodically different directions,

wherein, in a set including a predetermined magnet of said first magnet groups and a magnet of said second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets have mutually different tilts with respect to the central axis of said coil.

13. An exposure apparatus for exposing a substrate with a pattern of an original, said apparatus comprising:

a stage for moving at least one of an original and a substrate; and

a linear motor for driving said stage, said linear motor including (i) a coil, (ii) a plurality of first magnet groups having polar directions disposed in periodically different directions, and (iii) a plurality of second magnet groups having polar directions disposed in periodically different directions,

wherein, in a set including a predetermined magnet of said first magnet groups and a magnet of said second magnet groups, corresponding to the predetermined magnet, magnetization directions of the set of magnets have mutually different tilts with respect to the central axis of said coil.