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Computer-implemented methods and systems for classifying defects on a specimen

  • US 20060082763A1
  • Filed: 10/12/2005
  • Published: 04/20/2006
  • Est. Priority Date: 10/12/2004
  • Status: Active Grant
First Claim
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1. A computer-implemented method for classifying defects on a specimen, comprising:

  • assigning individual defects detected on the specimen to defect groups based on one or more characteristics of the individual defects;

    displaying information about the defect groups to a user; and

    allowing the user to assign a classification to each of the defect groups.

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