Oblique parts or surfaces

• US 20060087064A1
• Filed: 10/27/2004
• Published: 04/27/2006
• Est. Priority Date: 10/27/2004
• Status: Active Grant

• Current Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Original Assignee: Palo Alto Research Center, Inc. (Xerox Holdings Corp.)
• Inventors: Fork, David K., Volkel, Armin R., Daniel, Jurgen
• Granted Patent: US 7,771,803 B2
• Time in Patent Office: Days
• US Class Current: 267/102
• CPC Class Codes: B81B 2203/0118 Cantilevers
• CPC Class Codes: B81B 3/0059 Constitution or structural means for controlling the movement not provided for in groups B81B3/0037 - B81B3/0056
• CPC Class Codes: B81C 1/0015 Cantilevers switches using MEMS H01H1/0036; electrostatic relays using micromechanics H01H59/0009; microelectro-mechanical resonators H03H9/02244
• CPC Class Codes: F16F 1/025 characterised by having a particular shape F16F1/04, F16F1/14, F16F1/18, F16F1/32, F16F1/34 take precedence
• CPC Class Codes: F16F 3/02 with springs made of steel or of other material having low internal friction
• CPC Class Codes: F16H 1/125 comprising spiral gears
• CPC Class Codes: G01R 1/06716 Elastic
• CPC Class Codes: G01R 1/06727 Cantilever beams
• CPC Class Codes: G01R 1/06744 Microprobes, i.e. having dimensions as IC details
• CPC Class Codes: H01L 24/72 Detachable connecting means consisting of mechanical auxiliary parts connecting the device, e.g. pressure contacts using springs or clips
• CPC Class Codes: H01L 24/90 Methods for connecting semiconductor or solid state bodies using means for bonding not being attached to, or not being formed on, the body surface to be connected, e.g. pressure contacts using springs or clips
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01005 Boron [B]
• CPC Class Codes: H01L 2924/01006 Carbon [C]
• CPC Class Codes: H01L 2924/01013 Aluminum [Al]
• CPC Class Codes: H01L 2924/01015 Phosphorus [P]
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/01023 Vanadium [V]
• CPC Class Codes: H01L 2924/01029 Copper [Cu]
• CPC Class Codes: H01L 2924/01033 Arsenic [As]
• CPC Class Codes: H01L 2924/01047 : Silver [Ag]
• CPC Class Codes: H01L 2924/01074 : Tungsten [W]
• CPC Class Codes: H01L 2924/01078 : Platinum [Pt]
• CPC Class Codes: H01L 2924/01079 : Gold [Au]
• CPC Class Codes: H01L 2924/01082 : Lead [Pb]
• CPC Class Codes: H01L 2924/014 : Solder alloys
• CPC Class Codes: H01L 2924/12042 : LASER
• CPC Class Codes: H01L 2924/15788 : Glasses, e.g. amorphous oxides, nitrides or fluorides
• CPC Class Codes: Y10T 29/49155 : Manufacturing circuit on or in base
• CPC Class Codes: Y10T 29/49204 : Contact or terminal manufacturing
• CPC Class Codes: Y10T 29/49609 : Spring making

Abstract

Various structures, such as microstructures and wall-like structures, can include parts or surfaces that are oblique. In some implementations, a cantilevered element includes a spring-like portion with a uniformly oblique surface or with another artifact of an oblique radiation technique. In some implementations, when a deflecting force is applied, a spring-like portion can provide deflection and spring force within required ranges. Various oblique radiation techniques can be used, such as radiation of a layer through a prism, and structures having spring-like portions with oblique radiation artifacts can be used in various applications, such as with downward or upward deflecting forces.

Claims

1. Apparatus comprising:

a structure with a support surface; and

a cantilevered element having a base supported on the support surface and extending from the base to a free part;

the cantilevered element including;

a spring-like portion that, when undeflected, extends obliquely from the base to the free part;

the spring-like portion having an oblique radiation artifact;

in response to deflecting force applied to the cantilevered element in use, the spring-like portion providing deflection and spring force within required ranges.

2. The apparatus of claim 1 in which the oblique radiation artifact is a uniformly oblique surface.

3. The apparatus of claim 1 in which the length of the spring-like portion from the base to the free part is between approximately 0.05 mm and 2.0 mm.

4. The apparatus of claim 1 in which the cantilevered element is a spring cantilever.

5. The apparatus of claim 1 in which the cantilevered element is wall-like, the cantilevered element further including:

a spreading portion that facilitates insertion of an object, the object being between the spring-like portion and the support surface after insertion.

6. The apparatus of claim 1 in which the cantilevered element provides at least one electrically conductive path between the support surface and the free part;

the apparatus further comprising;

an electrical contact on the support surface;

the cantilever element'"'"'s base being on the electrical contact.

7. The apparatus of claim 1 in which the spring-like portion includes polymer material.

8. A method of use comprising:

applying deflecting force to a cantilevered element;

the cantilevered element having a base supported on a support surface, the cantilevered element extending from the base to a free part;

the cantilevered element including a spring-like portion that, when undeflected, extends obliquely from the base to the free part;

the spring-like portion having an oblique radiation artifact; and

in response to deflecting force, providing deflection and spring force within required ranges from the spring-like portion.

9. The method of claim 8 in which an object contacting the cantilevered element'"'"'s free part applies deflecting force toward the support surface;

the required ranges of deflection and spring force being such that, in response to deflecting force, the free part moves to a position responsive to the object'"'"'s position and the free part maintains contact with the object.

10. The method of claim 8 in which an object being inserted under the cantilevered element applies deflecting force away from the support surface;

the required ranges of deflection and spring force being such that, in response to deflecting force, the spring-like portion allows insertion of the object and holds the object after insertion.

11. Apparatus comprising:

a structure with a support surface; and

a cantilevered element fabricated from material deposited over the support surface;

the cantilevered element having a base supported on the support surface and extending from the base to a free part;

the cantilevered element including;

a spring-like portion that, when undeflected, extends obliquely along a length from the base to the free part with a surface that, along most of the length, is uniformly oblique relative to the support surface;

in response to deflecting force applied to the cantilevered element in use, the spring-like portion providing deflection and spring force within required ranges.

12. The apparatus of claim 11 in which the surface that is uniformly oblique along most of the length is substantially planar.

13. The apparatus of claim 11 in which the surface that is uniformly oblique along most of the length extends, where uniformly oblique, in a direction between 10 degrees and 70 degrees from normal to the support surface.

14. The apparatus of claim 11 in which the surface that is uniformly oblique along most of the length is uniformly oblique along approximately 90% of the length between the base part and the free part.

15. The apparatus of claim 11 in which the spring-like portion has upper and lower surfaces disposed away from and toward the support surface, respectively;

the surface that is uniformly oblique along most of the length being one of the upper and lower surfaces.

16. The apparatus of claim 15 in which the upper and lower surfaces are substantially parallel.

17. The apparatus of claim 11 in which the cantilevered element further includes:

a flexible polymer component extending from the base to the free part;

the polymer component including the spring-like portion;

the spring-like portion having an upper surface that is disposed away from the support surface;

the surface that is uniformly oblique along most of the length being the upper surface;

the apparatus further comprising;

a deposited component on the spring-like portion'"'"'s upper surface;

the deposited component remaining on the upper surface as the polymer component flexes.

18. The apparatus of claim 11 in which the cantilevered element further includes:

a first part that is supported on the support surface at the base of the cantilevered element;

a second part connected to the first part, extending away from the first part to the free part;

the second part including the spring-like portion;

the spring-like portion having a lower surface disposed toward the support surface;

the surface that is uniformly oblique along most of the length being the lower surface.

19. The apparatus of claim 11 in which the cantilevered element further includes:

a first part that is supported on the support surface at the base of the cantilevered element;

a second part connected to the first part at a joint, the second part being substantially planar and extending away from the joint to the free part;

the second part and the support surface defining an oblique angle with the joint at its vertex.

20. The apparatus of claim 11 in which the cantilevered element further includes:

a first part that is supported on the support surface at the base of the cantilevered element;

a second part that is connected to the first part and extends away from the first part to the free part;

when the spring-like portion is undeflected, the second part having a portion that, along most of the length from the base to the free part, is uniformly oblique relative to the support surface;

the second part further including a curved portion between the first part and the portion that is uniformly oblique.

21. Apparatus comprising:

a spring cantilever fabricated on a support surface;

the spring cantilever, when undeflected, extending obliquely from a base on the support surface to a free part;

the spring cantilever having an oblique radiation artifact;

in response to deflecting force, the spring cantilever providing deflection and spring force within required ranges.

22. The apparatus of claim 21 in which the oblique radiation artifact is a surface that, along most of the cantilever spring'"'"'s length from the base to the free part, is uniformly oblique relative to the support surface.

23. The apparatus of claim 21 in which the spring cantilever includes a polymer component.

24. The apparatus of claim 21 in which the spring cantilever includes a plated metal component.

25. Apparatus comprising:

a structure with a support surface; and

an array of spring-like cantilevered elements fabricated on the support surface;

each cantilevered element having a base supported on the support surface and, when undeflected, extending obliquely from the base to a free part;

each cantilevered element including an oblique radiation artifact;

each cantilevered element, in response to deflecting force toward the support surface, providing deflection and spring force.

26. The apparatus of claim 25 in which each cantilevered element provides a respective electrically conductive path from its free part to the support surface.

27. The apparatus of claim 25 in which the apparatus is a detector that detects features of surfaces, the apparatus further comprising:

a device for detecting movement of each cantilevered element as its free part travels along a surface during detection.

28. Apparatus comprising:

a structure with a support surface; and

a wall-like cantilevered element fabricated from material deposited over the support surface;

the cantilevered element having a base supported on the support surface and extending from the base to a free part;

the cantilevered element including;

a spring-like portion that, when undeflected, extends obliquely along a length from the base to the free part with a lower surface disposed toward the support surface;

in response to deflecting force applied upward on the lower surface, the spring-like portion providing deflection and spring force within required ranges.

29. Apparatus comprising:

a cantilevered polymer element fabricated from material deposited over a support surface;

the cantilevered polymer element having a base part supported on the support surface and extending to a free part;

the cantilevered polymer element including;

a spring-like portion that, when undeflected, extends obliquely along a length from the base part to the free part;

in response to deflecting force applied to the cantilevered polymer element, the spring-like portion providing deflection and spring force within required ranges.

30. Apparatus comprising:

a cantilevered element fabricated from material deposited over a support surface;

the cantilevered element including;

a polymer component extending from a base part supported on the support surface to a free part;

the polymer component including a spring-like portion that, when undeflected, extends obliquely along a length from the base part to the free part with an upper surface that, along most of the length between the base part and the free part, is uniformly oblique relative to the support surface; and

a deposited component on the spring-like portion'"'"'s upper surface;

the deposited component remaining on the upper surface as the spring-like portion deflects in response to deflecting force.

31. The apparatus of claim 30 in which the deposited component provides an electrically conductive path between the support surface and the free part.

32. A structure fabricated from material deposited on a support surface;

the structure comprising;

a first part on the support surface; and

a cantilevered element connected to the first part, the cantilevered element including;

a spring-like portion that includes a second part extending away from the first part to a free part;

the second part having a lower surface;

when the spring-like portion is undeflected, a section of the lower surface being uniformly oblique relative to the support surface;

the section extending along most of the second part'"'"'s length between the first part and the free part.

33. The structure of claim 32 in which the free part further includes, connected to the second part, a third part;

the third part being substantially planar;

when the spring-like portion is undeflected, the third part being substantially parallel to the support surface.

34. A structure fabricated on a support surface;

the structure comprising;

a first part on the support surface; and

a cantilevered element connected to the first part at a joint, the cantilevered element including a substantially planar second part that extends away from the joint to a free part;

the second part and the support surface defining an oblique angle with the joint at its vertex.

35. A structure fabricated from material deposited on a support surface;

the structure comprising;

a first part on the support surface; and

a cantilevered element connected to the first part, the cantilevered element including a spring-like portion;

the spring-like portion including a second part that extends away from the first part to a free part;

the second part having a section along most of its length between the first part and the free part that, when the second part is undeflected, is uniformly oblique relative to the support surface;

the second part further having a curved section between the first part and the uniformly oblique section.

36. Apparatus comprising:

a structure with a support surface; and

first and second components fabricated from material deposited over the support surface;

the first and second components being capable of holding an object in place between them on or over the support surface;

the first component being a cantilevered element having a base supported on the support surface and extending from its base to a free part;

the first component including;

a spring-like portion that, when undeflected, extends obliquely along a length from the base to the free part with a lower surface disposed toward the support surface and toward the second component;

when the object is inserted between the lower surface, the second component, and the support surface, the spring-like portion providing deflection sufficient to permit insertion and spring force sufficient to hold the object.

37. The apparatus of claim 36 in which the second component is also a cantilevered element having a base supported on the support surface and extending from its base to a free part;

the second component including;

a second component'"'"'s spring-like portion that, when undeflected, extends obliquely from the second component'"'"'s base to the second component'"'"'s free part;

the first and second components'"'"' spring-like portions extending obliquely toward each other.

38. The apparatus of claim 37 in which the first and second components'"'"' spring-like portions are approximately symmetrical and separated by a substantially uniform distance;

the first and second components each further including an insertion end from which the object can be inserted;

the first and second components′

insertion ends being separated by more than the substantially uniform distance.

39. The apparatus of claim 36 in which the second component has a sidewall disposed toward the first component, the object being held between the first component'"'"'s lower surface and the sidewall.

40. The apparatus of claim 36 in which the support surface has a groove defined therein between the first and second components;

the object further being held in the groove by the spring force.

41. The apparatus of claim 36 in which the object is an optical fiber.

42. The apparatus of claim 36 in which the object is a microfluidic tube.

43. The apparatus of claim 36 in which the object is electrically conductive, the spring-like portion providing an electrical connection to the object.

44. Apparatus comprising:

a structure with a support surface; and

cantilevered elements fabricated from material deposited over the support surface;

the cantilevered elements including an arrangement of at least one first side element on a first side of an object position over or on the substrate surface and an arrangement of at least one second side element on a second side of the object position opposite the first side;

the first and second side elements being capable of holding an object in the object position;

each of the cantilevered elements having a base supported on the support surface and extending from the base to a free part;

each of the cantilevered elements including;

a spring-like portion that, when undeflected, extends obliquely along a length from the base to the free part and toward the object position;

when an object is inserted into the object position, the spring-like portions providing deflection sufficient to permit insertion and spring force sufficient to hold the object.

45. The apparatus of claim 44 in which the arrangement of first side elements includes a first cantilevered element and the arrangement of second side elements includes a second cantilevered element;

the spring-like portions of the first and second cantilevered elements extending toward each other;

the spring-like portions being approximately symmetrical.

46. The apparatus of claim 45 in which the spring-like portions of the first and second cantilevered elements are separated by a substantially uniform distance;

each of the first and second cantilevered elements having an insertion end from which the object can be inserted into the object position;

the insertion ends of the first and second cantilevered components being separated by more than the substantially uniform distance.

47. The apparatus of claim 44 in which the arrangement of first side elements includes two or more cantilevered elements.

48. A method comprising:

fabricating a cantilevered element on a support surface, the cantilevered element having a base supported on the support surface and extending from the base to a free part;

the act of fabricating the cantilevered element comprising;

fabricating a spring-like portion of the cantilevered element;

the spring-like portion, when undeflected, extending obliquely along a length from the base to the free part;

the spring-like portion including an oblique radiation artifact;

in response to deflecting force applied to the cantilevered element in use, the spring-like portion providing deflection and spring force within required ranges.

49. The method of claim 48 in which the act of fabricating the spring-like portion comprises:

producing a polymer wall;

the polymer wall having a base supported on a substrate'"'"'s surface and an inclined surface extending from the base obliquely away from the substrate'"'"'s surface;

at least a portion of the inclined surface being uniformly oblique relative to the substrate'"'"'s surface.

50. The method of claim 49 in which the act of fabricating the spring-like portion further comprises:

depositing material on the polymer wall.

51. The method of claim 49 in which producing the polymer wall comprises:

exposing a portion of a photoresist layer to incident light through a prism.

52. A method comprising:

exposing a portion of a photoresist layer on a support surface to incident light received through a prism at a first angle oblique to the support surface; and

processing the photoresist layer to produce a polymer wall that extends at a second angle oblique to the support surface.