Substrate conveyor apparatus, substrate conveyance method and exposure apparatus
First Claim
1. With respect to a substrate conveyor apparatus that, being a substrate conveyor apparatus that carries substrates on which patterns are formed, carries the substrates in a state protected by a protective cover when the substrate is not used, a substrate conveyor apparatus characterized by having a cover protection means that conceals the inner surface of the protective cover when the substrate is used.
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Accused Products
Abstract
With respect to a substrate conveyor apparatus that, being a substrate conveyor apparatus that carries substrates on which patterns are formed, carries the substrates in a state protected by a protective cover when the substrate is not used, a substrate conveyor apparatus having a cover protection means that conceals the inner surface of the protective cover when the substrate is used.
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Citations
21 Claims
- 1. With respect to a substrate conveyor apparatus that, being a substrate conveyor apparatus that carries substrates on which patterns are formed, carries the substrates in a state protected by a protective cover when the substrate is not used, a substrate conveyor apparatus characterized by having a cover protection means that conceals the inner surface of the protective cover when the substrate is used.
- 15. With respect to a substrate conveyor apparatus that, being a substrate conveyor apparatus that carries substrates on which patterns are formed, carries the substrates in a state protected by a protective cover when the substrate is not used, a substrate conveyor apparatus characterized by having a grounding means that grounds the substrate or the protective cover.
- 18. With respect to a substrate conveyance method that, being a substrate conveyance method that carries substrates on which patterns are formed, carries the substrates in a state protected by a protective cover when the substrate is not used, a substrate conveyance method characterized by holding the protective cover on standby so that the inner surface of the protective cover is concealed when the substrate is used.
Specification