Optical switches with uniaxial mirrors

• US 20060088242A1
• Filed: 12/08/2005
• Published: 04/27/2006
• Est. Priority Date: 12/31/2003
• Status: Abandoned Application

• Current Assignee: Active Optical Networks, Inc.
• Original Assignee: Active Optical Networks, Inc.
• Inventors: Novotny, Vlad
• Application Number:
  US11/298,229
• Publication Number:
  US 20060088242A1
• Time in Patent Office: Days
• US Class Current: 385/18
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833
• CPC Class Codes: G02B 6/356 in an optical cross-connect device, e.g. routing and switching aspects of interconnecting different paths propagating different wavelengths to (re)configure the various input and output links switching polarized beams G02B6/3594; power equalizers G02B6/356 and G02B6/3594; path selecting means H04Q11/0001
• CPC Class Codes: G02B 6/357 Electrostatic force electrostatic forces controlling reflecting elements in general G02B26/0841
• CPC Class Codes: G02B 6/3584 constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching MEMS per se B81B, B81C
• CPC Class Codes: G02B 6/3588 of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
• CPC Class Codes: G02B 6/3594 Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

Described are various optical, opto-electrical and electrical components and subsystems. Micro-Electro-Mechanical Systems (MEMS) actuators that employ electrostatic combs adjust uniaxial, unidirectional or bidirectional mirrors between two basic positions with optical power control, one position for each of two switch configurations. Limiting the switching mirrors to two positions limits flexibility, but greatly reduces system cost and complexity, and simplifies beam alignment. In one embodiment, a frame surrounding the comb teeth maintains spacing between teeth to prevent electrical shorts.

Claims

1. An electrostatic actuator comprising:

a. an actuated member;

b. a first comb extending from the actuated member, the first comb including a first plurality of comb teeth having a first plurality of interconnected tooth ends and a second plurality of interconnected tooth ends;

c. a second comb including a second plurality of comb teeth interdigitated to an extent with the first plurality of comb teeth; and

d. a voltage source applying a bias voltage between the first and second combs;

e. wherein increasing the bias voltage increases the extent to which the first and second pluralities of comb teeth are interdigitated.

2. The actuator of claim 1, the first comb including a frame, and wherein the frame interconnects the second plurality of interconnected tooth end.

3. The actuator of claim 1, wherein the actuated member comprises a mirror.

4. The actuator of claim 1, wherein the actuated member pivots on an axis of rotation.

5. The actuator of claim 4, wherein the actuated member has a center of gravity, and wherein the axis of rotation intersects the center of gravity.

6. The actuator of claim 5, wherein the first plurality of teeth do not extend across the axis of rotation.

7. The actuator of claim 1, wherein the actuator is part of a variable optical attenuator.

8. The actuator of claim 1, wherein the actuator is part of a one-by-n switch.

9. The actuator of claim 8, wherein the switch includes a collimator having n fibers.

10. The actuator of claim 9, wherein the fibers are focused using at least one focusing element selected from the group consisting of a single lens common to multiple ones of the n fibers, grin fibers, fiber lenses, discrete lenses, and lens arrays.

11. An actuator comprising:

a. a first electrical contact connected to a first voltage source;

b. a second electrical contact connected to a second voltage source;

c. a first conductive layer connected to the first voltage source via the first electrical contact;

d. a second conductive layer connected to the second voltage source via the second electrical contact; and

e. an insulating layer of an insulating-layer thickness disposed between the first and second conductive layers;

f. wherein a portion of the first conductive layer approaches the second conductive layer in response to a voltage potential applied between the first and second electrical contacts; and

g. wherein the insulating layer forms a ledge separating the first and second conductive layers by a surface conduction path greater than the insulating layer thickness.

12. The actuator of claim 11, wherein the first conductive layer includes a first comb having a first plurality of teeth and the second conductive layer includes a second comb having a second plurality of teeth, and wherein the first and second pluralities of teeth are interdigitated from a perspective normal to the first conductive layer.

13. The actuator of claim 11, further comprising a mirror surface disposed on the first conductive layer.

14. The actuator of claim 13, further comprising an input fiber directing a light beam at the mirror surface to produce a reflected beam and an output fiber receiving at least a portion of the reflected beam, wherein the portion is of an intensity determined by the applied voltage potential.

15. The actuator of claim 14, further comprising a second output fiber, wherein the mirror surface directs the reflected beam to the second output fiber in response to a second applied voltage potential.

16. The actuator of claim 11, wherein the first conductive layer is patterned using an etch process, and wherein the etch process etches through a first portion of the first conductive layer at a first etch rate and etches through a second portion of the first conductive layer at a second etch rate slower than the first etch rate.

17. The actuator of claim 11, wherein the actuator is part of a variable optical attenuator.

18. The actuator of claim 11, wherein the actuator is part of a one-by-n switch.

19. The actuator of claim 18, wherein the switch includes a collimator having n fibers.

20. The actuator of claim 19, wherein the fibers are focused using at least one focusing element selected from the group consisting of a single lens common to multiple ones of the n fibers, grin fibers, fiber lenses, discrete lenses, and lens arrays.

21. An actuator comprising:

a. a substrate;

b. an actuated member connected to the substrate and having a rotational axis parallel to the substrate;

c. first and second movable combs extending from the actuated member on either side of the rotational axis from a perspective normal to the substrate;

d. first and second fixed combs connected to the substrate, wherein the first and second fixed combs are on opposite sides of the rotational axis from the perspective normal to the substrate; and

e. a hinge connecting the movable combs to the substrate, the hinge having a hinge thickness in a dimension normal to the substrate and a hinge width in a dimension parallel to the substrate, wherein the hinge thickness is less than the hinge width.

22. The actuator of claim 21, wherein the actuated member comprises a mirror surface.

23. The actuator of claim 21, wherein the actuator is part of a variable optical attenuator.

24. The actuator of claim 21, wherein the movable combs have a comb thickness in the dimension normal to the substrate, and wherein the comb thickness is greater than the hinge thickness.

25. The actuator of claim 21, wherein the actuator is part of a one-by-n switch.

26. The actuator of claim 25, wherein the switch includes a collimator having n fibers.

27. The actuator of claim 26, wherein the fibers are focused using a focusing element selected from the group consisting of a single lens common to multiple one of the n fibers, grin fibers, fiber lenses, discrete lenses, and lens arrays.