Pressure sensor with non-planar membrane
First Claim
1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
- a chamber partially defined by a flexible membrane, the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects due to pressure differentials between the reference pressure and the fluid pressure; and
, associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure;
wherein, the membrane is non-planar.
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Accused Products
Abstract
A pressure sensor for sensing a fluid pressure in harsh environments such as the air pressure in a tire, by using a chamber partially defined by a flexible membrane (20), the chamber containing a fluid at a reference pressure, such that the flexible membrane (20) deflects due to pressure differentials between the reference pressure and the fluid pressure; and,
- associated circuitry for converting the deflection of the flexible membrane (20) into an output signal indicative of the fluid pressure; wherein,
- the membrane (20) is non-planar (22, 24).
It is possible to extend the linear range of the pressure-deflection response with a non-planar membrane (20). Corrugations, a series of raised annuli (22) or other surface features are an added complexity in the fabrication process but can extend the linear range of the sensor by 1 MPa.
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Citations
43 Claims
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1. A pressure sensor for sensing a fluid pressure, the pressure sensor comprising:
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a chamber partially defined by a flexible membrane, the chamber containing a fluid at a reference pressure, such that the flexible membrane deflects due to pressure differentials between the reference pressure and the fluid pressure; and
,associated circuitry for converting the deflection of the flexible membrane into an output signal indicative of the fluid pressure;
wherein,the membrane is non-planar. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43)
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Specification