Metal-semiconductor field effect transistors (MESFETs) having drains coupled to the substrate and methods of fabricating the same
First Claim
1. A unit cell of a metal-semiconductor field-effect transistor (MESFET), comprising a MESFET on a substrate, the MESFET having a source region, a drain region and a gate contact, the gate contact being between the source region and the drain region and the drain region being electrically coupled to the substrate through a contact via hole to the substrate.
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Abstract
The present invention provides a unit cell of a metal-semiconductor field-effect transistor (MESFET). The unit cell of the MESFET includes a MESFET having a source region, a drain region and a gate contact. The gate contact is disposed between the source region and the drain region. The drain region is electrically coupled to the substrate through a contact via hole to the substrate. Related methods of fabricating MESFETs are also provided herein.
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Citations
66 Claims
- 1. A unit cell of a metal-semiconductor field-effect transistor (MESFET), comprising a MESFET on a substrate, the MESFET having a source region, a drain region and a gate contact, the gate contact being between the source region and the drain region and the drain region being electrically coupled to the substrate through a contact via hole to the substrate.
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28. A unit cell of a metal-semiconductor field-effect transistor (MESFET), comprising:
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a silicon carbide (SiC) MESFET having a source region, a drain region and a gate contact, the gate contact being between the source region and the drain region; and
first and second ohmic contacts on the source region and the drain region. respectively, that respectively define a source contact and a drain contact, the drain region being electrically coupled to the substrate through a contact via hole to the substrate. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39)
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- 40. A method of forming a unit cell of a metal-semiconductor field-effect transistor (MESFET), comprising forming a MESFET on a substrate, the MESFET having a source region, a drain region and a gate contact, the gate contact being between the source region and the drain region and the drain region being electrically coupled to the substrate through a contact via hole to the substrate.
Specification