Fault detection through feedback
First Claim
Patent Images
1. A method, comprising:
- processing a workpiece;
performing a fault detection analysis relating to said processing of said workpiece;
determining a relationship of a parameter relating to said fault detection analysis to a detected fault; and
adjusting a weighting associated with said parameter based upon said relationship of said parameter to said detected fault.
3 Assignments
0 Petitions
Accused Products
Abstract
A method, apparatus and a system, for provided for performing a dynamic weighting technique for performing fault detection. The method comprises processing a workpiece and performing a fault detection analysis relating to the processing of the workpiece. The method further comprises determining a relationship of a parameter relating to the fault detection analysis to a detected fault and adjusting a weighting associated with the parameter based upon the relationship of the parameter to the detected fault.
-
Citations
54 Claims
-
1. A method, comprising:
-
processing a workpiece;
performing a fault detection analysis relating to said processing of said workpiece;
determining a relationship of a parameter relating to said fault detection analysis to a detected fault; and
adjusting a weighting associated with said parameter based upon said relationship of said parameter to said detected fault. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
-
-
18. A method, comprising:
-
processing a workpiece;
performing a fault detection analysis relating to said processing of said workpiece based upon a tool state parameter being input into a fault detection model associated with said fault detection analysis;
determining whether said parameter is associated with a detected fault as a result of performing said fault detection analysis; and
modifying a weighting of said parameter in said fault detection model based upon a determination that said parameter is associated with said detected fault. - View Dependent Claims (19, 20, 21, 22)
-
-
23. A method, comprising:
-
processing a workpiece;
performing a principal component analysis (PCA) relating to said processing of said workpiece based upon a tool state parameter being input into a PCA model associated with said PCA analysis;
determining whether said parameter is associated with a detected fault as a result of performing said PCA; and
modifying a weighting of said parameter in said PCA model based upon a determination that said parameter is associated with said detected fault. - View Dependent Claims (24)
-
-
25. An apparatus, comprising:
-
means for processing a workpiece;
means for performing a fault detection analysis relating to said processing of said workpiece;
means for determining a relationship of a parameter relating to said fault detection analysis to a detected fault; and
means for adjusting a weighting associated with said parameter based upon said relationship of said parameter to said detected fault.
-
-
26. A system, comprising:
-
a processing tool to perform a process upon a workpiece;
a metrology tool to acquire metrology data relating to said process performed on said workpiece to provide metrology data;
a tool state data sensor unit to acquire tool state data;
a controller operatively coupled to said processing tool, metrology tool and to said tool state data sensor unit, said controller to perform a fault detection analysis relating to said processing of said workpiece to determine a relationship between a parameter relating to said fault detection analysis and a detected fault, said controller to also adjust a weighting associated with said parameter based upon said relationship of said parameter to said detected fault. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33)
-
-
34. An apparatus, comprising:
a controller operatively to perform a fault detection analysis relating to a processing of a workpiece to determine a relationship between a parameter relating to said fault detection analysis and a detected fault, said controller to also adjust a weighting associated with said parameter based upon said relationship of said parameter to said detected fault. - View Dependent Claims (35, 36, 37, 38, 39, 40)
-
41. A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method, comprising:
-
processing a workpiece;
performing a fault detection analysis relating to said processing of said workpiece;
determining a relationship of a parameter relating to said fault detection analysis to a detected fault; and
adjusting a weighting associated with said parameter based upon said relationship of said parameter to said detected fault. - View Dependent Claims (42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54)
-
Specification