Microelectromechanical (MEM) device including a spring release bridge and method of making the same
First Claim
14. A method of forming an inertial sensor on a substrate, comprising the steps of:
- forming a sacrificial layer on a surface of the substrate;
forming an active layer over at least a portion of the sacrificial layer;
forming at least an anchor region and a suspension region in the active layer, the suspension region having formed therein at least a structure, a suspension spring, and a release bridge, the suspension spring coupled between the anchor region and the structure, and the release bridge coupled to the suspension spring; and
removing at least a portion of the sacrificial layer to thereby release the structure, the release bridge, and the suspension spring from the substrate, wherein the release bridge is sized such that the structure and the suspension spring are released substantially simultaneously during sacrificial layer removal.
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Accused Products
Abstract
A microelectromechanical (MEM) device includes a substrate, a suspension spring, a structure, and a release bridge. The suspension spring is coupled to, and suspended above, the substrate. The structure is coupled to the suspension spring and is resiliently suspended thereby above the substrate. The release bridge is coupled to the suspension spring. During sensor manufacture, the suspension spring and structure are suspended above the substrate by undergoing a release process. The release bridge is sized such that, during the release process, the structure and the suspension spring are released substantially simultaneously.
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Citations
31 Claims
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14. A method of forming an inertial sensor on a substrate, comprising the steps of:
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forming a sacrificial layer on a surface of the substrate;
forming an active layer over at least a portion of the sacrificial layer;
forming at least an anchor region and a suspension region in the active layer, the suspension region having formed therein at least a structure, a suspension spring, and a release bridge, the suspension spring coupled between the anchor region and the structure, and the release bridge coupled to the suspension spring; and
removing at least a portion of the sacrificial layer to thereby release the structure, the release bridge, and the suspension spring from the substrate, wherein the release bridge is sized such that the structure and the suspension spring are released substantially simultaneously during sacrificial layer removal. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 29)
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27. A microelectromechanical (MEM) device, comprising:
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a substrate;
a suspension spring coupled to, and suspended above, the substrate;
a structure coupled to the suspension spring and resiliently suspended thereby above the substrate; and
a release bridge coupled to the suspension spring, wherein;
the suspension spring and structure are suspended above the substrate by undergoing a release process, and the release bridge is sized such that, during the release process, the structure and the suspension spring are released substantially simultaneously. - View Dependent Claims (1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 28, 30, 31)
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28-1. The MEM device of claim 27, further comprising:
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a second suspension spring coupled to, and suspended above, the substrate, the second suspension spring coupled to the structure, wherein a second release bridge is coupled to the second suspension spring.
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Specification