Structured silicon anode
First Claim
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1. An integrated silicon electrode for a battery, comprising a regular or irregular array of sub-micron silicon structures fabricated on a silicon substrate.
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Abstract
A silicon/lithium battery can be fabricated from a silicon substrate. This allows the battery to be produced as an integrated unit on a chip. The battery includes a silicon anode formed from submicron diameter pillars of silicon fabricated on an end-type silicon wafer.
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Citations
8 Claims
- 1. An integrated silicon electrode for a battery, comprising a regular or irregular array of sub-micron silicon structures fabricated on a silicon substrate.
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