Sensor and method for detecting a deformation
First Claim
Patent Images
1. A sensor comprising:
- a substrate having a mechanically deformable region;
a magnetostrictive multi-layer sensor element for detecting a mechanical deformation of the mechanically deformable region, the multi-layer sensor element comprising a sensor layer consisting of a material having a positive or a negative magnetostriction constant; and
a device, arranged on the substrate, for generating a controllable magnetic field by which a performance of the sensor element is influenced.
1 Assignment
0 Petitions
Accused Products
Abstract
A sensor has a substrate having a mechanically deformable region, a magnetostrictive spin-valve sensor element being arranged to detect a mechanical deformation of the mechanically deformable region. On the substrate, there is a device for generating a controllable magnetic field by which a performance of the sensor element is influenced.
-
Citations
37 Claims
-
1. A sensor comprising:
-
a substrate having a mechanically deformable region;
a magnetostrictive multi-layer sensor element for detecting a mechanical deformation of the mechanically deformable region, the multi-layer sensor element comprising a sensor layer consisting of a material having a positive or a negative magnetostriction constant; and
a device, arranged on the substrate, for generating a controllable magnetic field by which a performance of the sensor element is influenced. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
-
-
25. A method for detecting a deformation of a mechanically deformable region arranged on a substrate by means of a magnetostrictive multi-layer sensor element, comprising the steps of:
-
adjusting an operating point of the magnetostrictive multi-layer sensor element by applying a magnetic field; and
detecting a value indicating the mechanical deformation of the mechanically deformable region at the position of the magnetostrictive multi-layer sensor element. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
-
Specification