Nano-VCSEL device and fabrication thereof using nano-colonnades
First Claim
1. A nano-colonnade vertical cavity surface emitting laser (VCSEL) device comprising:
- a first layer having a (111) horizontal surface;
a second layer;
an insulator support between the first layer and the second layer that separates the first layer from the second layer, a portion of the second layer overhanging the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer;
a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of the overhanging portion; and
distributed Bragg mirrors adjacent to opposite ends of the nanowire column.
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Accused Products
Abstract
A nano-colonnade VCSEL device and a method of fabrication utilize a nanowire column grown nearly vertically from a (111) horizontal surface of a first layer to another horizontal surface of a second layer to connect the layers. The VCSEL device includes a first layer having the (111) horizontal surface; a second layer; and an insulator support between the first layer and the second layer that separates the first layer from the second layer. A portion of the second layer overhangs the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer. The VCSEL device further includes a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface, and distributed Bragg mirrors adjacent to opposite end of the nanowire column.
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Citations
50 Claims
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1. A nano-colonnade vertical cavity surface emitting laser (VCSEL) device comprising:
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a first layer having a (111) horizontal surface;
a second layer;
an insulator support between the first layer and the second layer that separates the first layer from the second layer, a portion of the second layer overhanging the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer;
a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of the overhanging portion; and
distributed Bragg mirrors adjacent to opposite ends of the nanowire column. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28)
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29. A nano-colonnade vertical cavity surface emitting laser (VCSEL) array device comprising:
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a first layer having a (111) horizontal surface;
a second layer;
an insulator support between the first layer and the second layer that separates the first layer from the second layer, back-to-back portions of the second layer overhanging the insulator support, such that a horizontal surface of the back-to-back overhanging portions is spaced from and faces the (111) horizontal surface of the first layer;
a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of each overhanging portion; and
distributed Bragg mirrors adjacent to opposite ends of the nanowire columns. - View Dependent Claims (30, 31)
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32. A nano-colonnade vertical cavity surface emitting laser (VCSEL) device with an integral pump comprising:
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a first layer having a (111) horizontal surface;
a second layer;
an insulator support between the first layer and the second layer that separates the first layer from the second layer, a portion of the second layer overhanging the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer;
a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of the overhanging portion, the nanowire column comprising a quantum dot;
distributed Bragg mirrors adjacent to opposite ends of the nanowire column; and
an optical pump on the first layer, the optical pump having an output directed at the nanowire column, the optical pump optically pumping the quantum dot. - View Dependent Claims (33, 34, 35)
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36. A nano-colonnade vertical cavity surface emitting laser (VCSEL) device comprising:
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a first layer having a (111) horizontal surface;
a second layer;
an insulator support between the first layer and the second layer that separates the first layer from the second layer, a portion of the second layer overhanging the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer;
a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of the overhanging portion; and
means for delineating a vertical optical cavity with the nanowire column. - View Dependent Claims (37)
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38. A nano-colonnade VCSEL device with an integral pump comprising:
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a first layer having a (111) horizontal surface;
a second layer;
an insulator support between the first layer and the second layer that separates the first layer from the second layer, a portion of the second layer overhanging the insulator support, such that a horizontal surface of the overhanging portion is spaced from and faces the (111) horizontal surface of the first layer;
a nanowire column extending nearly vertically from the (111) horizontal surface to the facing horizontal surface of the overhanging portion, the nanowire column comprising means for producing single photon emissions;
distributed Bragg mirrors adjacent to opposite ends of the nanowire column to form a nanowire laser cavity; and
means for pumping a laser cavity. - View Dependent Claims (39, 40, 41)
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42. A method of fabricating a nano-colonnade VCSEL device comprising:
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providing a wafer having a material that acts as an insulating layer sandwiched between a (111) horizontal surface of a first layer and a second layer;
etching the wafer to expose a section of the (111) horizontal surface and to cantilever a portion of the second layer over the exposed section, a section of the insulating layer supporting the cantilevered portion;
growing a nanowire column from the exposed (111) surface to a facing horizontal surface of the cantilevered portion to bridge the first layer and the second layer; and
forming distributed Bragg mirrors adjacent to opposite ends of the nanowire column to delineate a vertical laser cavity with the nanowire column. - View Dependent Claims (43, 44, 45, 46, 47, 48, 49, 50)
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Specification