Cross-sectional mapping of spectral absorbance features
First Claim
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1. A method, comprising:
- combining and guiding optical radiation from a plurality of light sources, each emitting at wavelengths within a spectral band different from others, towards a sample through a common optical waveguide;
reflecting a first portion of the combined radiation away from the sample at its vicinity while directing a second portion of the combined radiation to reach the sample;
collecting and guiding at least part of the reflected first portion and at least part of a reflected second portion from the sample towards a detection module through the common optical waveguide;
separating the light into a plurality of spectral bands corresponding to emitting spectral bands of the light sources; and
directing light radiation of the separated spectral bands to a plurality of light detectors, respectively.
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Abstract
Designs, implementations, and techniques for optically measuring a sample to obtain spectral absorbance map of the sample. Light at different wavelength bands may be used to detect different absorption features in the sample. Multiple light sources may be used including tunable lasers.
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Citations
20 Claims
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1. A method, comprising:
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combining and guiding optical radiation from a plurality of light sources, each emitting at wavelengths within a spectral band different from others, towards a sample through a common optical waveguide;
reflecting a first portion of the combined radiation away from the sample at its vicinity while directing a second portion of the combined radiation to reach the sample;
collecting and guiding at least part of the reflected first portion and at least part of a reflected second portion from the sample towards a detection module through the common optical waveguide;
separating the light into a plurality of spectral bands corresponding to emitting spectral bands of the light sources; and
directing light radiation of the separated spectral bands to a plurality of light detectors, respectively. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A device for optically measuring a sample, comprising:
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a plurality of light sources emitting light at different wavelength bands centered at different wavelengths;
a single waveguide to receive and guide the light at the different wavelength bands in a first propagation mode;
a probe head coupled to the waveguide to receive the light from the waveguide and to reflect a first portion of the light back to the waveguide in the first propagation mode and direct a second portion of the light to a sample, the probe head collecting reflection of the second portion from the sample and exporting to the waveguide the reflection as a reflected second portion in a second propagation mode different from the first propagation mode;
an optical differential delay unit to produce and control a relative delay between the reflected first portion and the reflected second portion received from the single waveguide in response to a control signal;
a detection module to receive the reflected first portion and the reflected second portion in the waveguide and to extract information of the sample carried by the reflected second portion; and
a control unit, which produces the control signal to the optical differential delay unit, to set the relative delay at two different bias values to select a layer of material inside the sample to measure an optical absorption of the selected layer at each and every wavelength from the different light sources. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17)
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18. A device for optically measuring a sample, comprising:
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a plurality of tunable laser sources emitting light within different wavelength bands centered at different wavelengths;
a single waveguide to receive and guide the light at the different wavelength bands in a first propagation mode;
a probe head coupled to the waveguide to receive the light from the waveguide and to reflect a first portion of the light back to the waveguide in the first propagation mode and direct a second portion of the light to a sample, the probe head collecting reflection of the second portion from the sample and exporting to the waveguide the reflection as a reflected second portion in a second propagation mode different from the first propagation mode;
a detection module to receive the reflected first portion and the reflected second portion in the waveguide and to extract information of the sample carried by the reflected second portion; and
a control unit to tune each tunable laser in a corresponding laser emitting wavelength band to obtain absorption measurements of the sample at different wavelengths within each corresponding wavelength band. - View Dependent Claims (19, 20)
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Specification