Angular rate sensor with temperature compensation and vibration compensation
First Claim
1. An angular rate sensing device with temperature compensation and vibration compensation comprising:
- a base;
a vibrator having multiple proof masses, arranged in the base;
a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and
a plurality of planar electrodes arranged relative to the proof masses, wherein each of the planar electrodes is connected to two signal lines with phase difference of 180 degree, for sensing motion of the proof masses relative to the planar electrodes through the capacitance variation between the planar electrodes and the proof masses;
wherein the vibration error is compensated by way of connecting the signal lines, whose phase difference is of 0 degree, of the planar electrodes, whose position difference is of 180 degree;
wherein the thermal expansion error is compensated by way of connecting the signal lines, whose phase difference is of 180 degree, of the planar electrodes, whose position difference is of 90 degree.
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Accused Products
Abstract
An angular rate sensing device with temperature compensation and vibration compensation is provided. The device includes a base; a vibrator having multiple proof masses, arranged in the base; a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and a plurality of planar electrodes arranged relative to the proof masses, wherein each of the planar electrodes is connected to two signal lines with phase difference of 180 degree. The vibration error is compensated by way of connecting the signal lines, whose phase difference is of 0 degree, of the planar electrodes, whose position difference is of 180 degree; wherein the thermal expansion error is compensated by way of connecting the signal lines, whose phase difference is of 180 degree, of the planar electrodes, whose position difference is of 90 degree.
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Citations
37 Claims
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1. An angular rate sensing device with temperature compensation and vibration compensation comprising:
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a base;
a vibrator having multiple proof masses, arranged in the base;
a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and
a plurality of planar electrodes arranged relative to the proof masses, wherein each of the planar electrodes is connected to two signal lines with phase difference of 180 degree, for sensing motion of the proof masses relative to the planar electrodes through the capacitance variation between the planar electrodes and the proof masses;
wherein the vibration error is compensated by way of connecting the signal lines, whose phase difference is of 0 degree, of the planar electrodes, whose position difference is of 180 degree;
wherein the thermal expansion error is compensated by way of connecting the signal lines, whose phase difference is of 180 degree, of the planar electrodes, whose position difference is of 90 degree. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. An angular rate sensing device with temperature compensation and vibration compensation comprising:
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a first base and a second base;
a vibrator having multiple proof masses, arranged in the first base, wherein the proof masses are connected to the vibrator;
a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the first base;
a plurality of electrodes for driving and controlling the flexible supporting members to oscillate such that the oscillation mode of the vibrator in driving mode may be controlled; and
a plurality of planar electrodes arranged relative to the proof masses, wherein each of the planar electrodes is connected to two signal lines with phase difference of 180 degree, for sensing motion of the proof masses relative to the planar electrodes through the capacitance variation between the planar electrodes and the proof masses;
wherein the vibration error is compensated by way of connecting the signal lines, whose phase difference is of 0 degree, of the planar electrodes, whose position difference is of 180 degree;
wherein the thermal expansion error is compensated by way of connecting the signal lines, whose phase difference is of 180 degree, of the planar electrodes, whose position difference is of 90 degree. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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Specification