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Angular rate sensor with temperature compensation and vibration compensation

  • US 20060101909A1
  • Filed: 10/19/2005
  • Published: 05/18/2006
  • Est. Priority Date: 11/12/2004
  • Status: Abandoned Application
First Claim
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1. An angular rate sensing device with temperature compensation and vibration compensation comprising:

  • a base;

    a vibrator having multiple proof masses, arranged in the base;

    a plurality of flexible supporting members connected to the vibrator and supporting the vibrator to be suspended in the base; and

    a plurality of planar electrodes arranged relative to the proof masses, wherein each of the planar electrodes is connected to two signal lines with phase difference of 180 degree, for sensing motion of the proof masses relative to the planar electrodes through the capacitance variation between the planar electrodes and the proof masses;

    wherein the vibration error is compensated by way of connecting the signal lines, whose phase difference is of 0 degree, of the planar electrodes, whose position difference is of 180 degree;

    wherein the thermal expansion error is compensated by way of connecting the signal lines, whose phase difference is of 180 degree, of the planar electrodes, whose position difference is of 90 degree.

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