Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage
First Claim
1. A stage assembly that positions a work piece about a first axis, the stage assembly comprising:
- a first stage;
a second stage that retains the work piece;
a second mover assembly that moves the second stage relative to the first stage about the first axis;
a measurement system that monitors the position of the second stage about the first axis when the second stage is positioned within a FA working range about the first axis; and
an initialization system that facilitates movement of the second stage about the first axis when the second stage is rotated about the first axis outside the FA working range.
1 Assignment
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Accused Products
Abstract
A stage assembly (220) that moves a work piece (200) about a first axis and along a first axis includes a first stage (238), a second stage (240) that retains the work piece (200), a second mover assembly (244), a measurement system, and an initialization system (1081A). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) about the first axis. The measurement system (22) monitors the position of the second stage (240) about the first axis when the second stage (240) is positioned within a working range about the first axis. The initialization system (1081A) facilitates movement of the second stage (240) about the first axis when the second stage (240) is rotated about the first axis outside the working range. The second mover assembly (244) can include a mover (255) and a dampener (410) that reduces the transmission of vibration from the first stage (238) to the second stage (240). In addition, the stage assembly (220) can include a control system (24) that directs power to the mover (255) to position the second stage (240) and to compensate for vibration of the first stage (238).
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Citations
41 Claims
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1. A stage assembly that positions a work piece about a first axis, the stage assembly comprising:
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a first stage;
a second stage that retains the work piece;
a second mover assembly that moves the second stage relative to the first stage about the first axis;
a measurement system that monitors the position of the second stage about the first axis when the second stage is positioned within a FA working range about the first axis; and
an initialization system that facilitates movement of the second stage about the first axis when the second stage is rotated about the first axis outside the FA working range. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A stage assembly that positions a work piece along a first axis, the stage assembly comprising:
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a first stage;
a second stage that retains the work piece;
a second mover assembly that moves the second stage relative to the first stage along the first axis, the second mover assembly including a first mover component and a dampener that reduces the transmission of a disturbance of the first stage from being transferred to the second stage; and
a control system that directs power to the first mover component to compensate for the disturbance that is transmitted through the dampener. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A method for positioning a work piece about a first axis, the method comprising the steps of:
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providing a first stage;
providing a second stage that retains the work piece;
moving the second stage relative to the first stage about the first axis with a second mover assembly;
monitoring the position of the second stage about the first axis when the second stage is positioned within a FA working range about the first axis with a measurement system; and
initializing the measurement system with an initialization system that facilitates movement of the second stage about the first axis when the second stage is rotated about the first axis outside the FA working range. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34)
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35. A method for positioning a work piece along a first axis, the method comprising the steps of:
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providing a first stage;
providing a second stage that retains the work piece;
moving the second stage relative to the first stage along the first axis with a second mover assembly, the second mover assembly including a first mover component and a dampener that reduces the transmission of a disturbance of the first stage from being transferred to the second stage; and
directing power to the first mover component to position the second stage and to compensate for the disturbance that is transmitted through the dampener. - View Dependent Claims (36, 37, 38, 39, 40, 41)
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Specification