Methods for incorporating high k dielectric materials for enhanced SRAM operation and structures produced thereby
First Claim
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1. Independent Structure Claim:
- An interconnect structure comprising a multitude of conductors disposed atop a first dielectric wherein the spaces between a first subset of said multitude of conductors is occupied by a second dielectric and the spaces between a second subset of said multitude of conductors is occupied by a third dielectric.
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Abstract
A hybrid interconnect structure that possesses a higher interconnect capacitance in one set of regions than in other regions on the same microelectronic chip is described. Several methods to fabricate such a structure are provided. Circuit implementations of such hybrid interconnect structures are described that enable increased static noise margin and reduce the leakage in SRAM cells and common power supply voltages for SRAM and logic in such a chip. Methods that enable combining these circuit benefits with higher interconnect performance speed and superior mechanical robustness in such chips are also taught.
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Citations
45 Claims
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1. Independent Structure Claim:
- An interconnect structure comprising a multitude of conductors disposed atop a first dielectric wherein the spaces between a first subset of said multitude of conductors is occupied by a second dielectric and the spaces between a second subset of said multitude of conductors is occupied by a third dielectric.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 35, 36, 37, 38, 44, 45)
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27. (Method 3:
- Build in robust IMD/EBGF UHK/EBGF ULK) A method of fabricating a hybrid interconnect structure comprising the steps of;
depositing a first dielectric and patterning trenches and vias in said first dielectric on a substrate;
filling said trenches and vias with a conductive barrier and a higher conductivity fill material to form interconnect wiring structures;
forming a first block out resist pattern to expose only a first set of interconnects in a first region of the substrate;
etching said first dielectric from between said first set of interconnect wires located in said first region and stripping the photoresist;
filling the etched gaps between said first set of interconnect wires with a second dielectric and planarizing it to form a coplanar structure;
forming a second blockout photoresist pattern that exposes a second region of the substrate comprising a second set of interconnects;
etching said first dielectric from between said second set of interconnects and stripping the photoresist;
and filling the etched gaps between said second set of interconnects with a third dielectric and planarizing to form a coplanar structure. - View Dependent Claims (28, 29, 30, 31, 32, 33)
- Build in robust IMD/EBGF UHK/EBGF ULK) A method of fabricating a hybrid interconnect structure comprising the steps of;
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39. A method of fabricating a hybrid interconnect structure comprising the steps of:
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depositing a first dielectric and patterning trenches and vias in said first dielectric on a substrate;
filling said trenches and vias with a conductive barrier and a higher conductivity fill material to form interconnect wiring structures;
forming a block out resist pattern in a first region of the substrate to expose only a first subset of said interconnect structures;
treating said first subset of said interconnect structures by a method selected from ion implanation, photon irradiation, chemical infiltration from liquid, vapor or supercritical fluid media, thermal annealing and combinations thereof;
resulting in the modification of the said first dielectric in said exposed area to convert it into a second dielectric with a higher dielectric constant so as to enable higher capacitive coupling between the interconnect lines in said exposed region;
and stripping the blockout photoresist from the surface. - View Dependent Claims (40, 41, 42, 43)
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Specification