Mask frame assembly

• US 20060103289A1
• Filed: 11/16/2005
• Published: 05/18/2006
• Est. Priority Date: 11/18/2004
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Mobile Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Kim, Tae-Hyung, Kim, Eui-Gyu
• Granted Patent: US 7,987,812 B2
• Time in Patent Office: Days
• US Class Current: 313/402
• CPC Class Codes: B05B 12/20 Masking elements, i.e. elements defining uncoated areas on an object to be coated
• CPC Class Codes: C23C 14/042 using masks
• CPC Class Codes: G03F 7/70783 Handling stress or warp of chucks, masks or workpieces, e.g. to compensate for imaging errors or considerations related to warpage of masks or workpieces due to their own weight
• CPC Class Codes: H10K 71/00 Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

A mask assembly configured to prevent the mask from being thermally transformed and to maintain gaps between a plurality of divided pattern masks is disclosed. According to one embodiment, the mask assembly comprises: an open mask that has a plurality of first openings arranged in rows and columns; and a pattern mask that comprises a plurality of unit pattern masks. In some embodiments, the ends of the unit pattern masks may be fixed with respect to the open mask, and the unit pattern mask includes a plurality of mask pattern units configured to align with the plurality of first openings of the open mask. In some embodiments, a tensile force is applied to the unit pattern mask(s).

Claims

1. A mask assembly for depositing a thin film of a flat panel display, the mask assembly comprising:

an open mask including a plurality of first openings arranged in rows and columns, the rows being formed in a first direction and the columns being formed in a second direction; and

a pattern mask including a plurality of unit pattern masks;

wherein a tensile force is applied to each unit pattern mask by fixing both ends of each unit pattern mask to the open mask in the first direction or the second direction.

2. The assembly of claim 1, wherein each unit pattern mask includes a plurality of mask pattern units that substantially align with a single row or column of the first openings.

3. The assembly of claim 2, wherein each of the mask pattern units includes a plurality of second openings that have longer sides in either the first or second direction, the second openings extending partially across the width of the unit pattern mask.

4. The assembly of claim 2, wherein each mask pattern unit includes a plurality of second openings having the same patterns as the thin film of the flat panel display.

5. The assembly of claim 1, wherein the unit pattern mask is elongated, and attached to the open mask such that the elongated sides are oriented in the first or second direction.

6. The assembly of claim 5, wherein each unit pattern mask includes a plurality of mask pattern units that correspond to a single row or column of the first openings.

7. The assembly of claim 6, wherein each mask pattern unit includes a plurality of slots that are elongated and partially extend across the width of the unit pattern mask and arranged along a portion of the length of the unit pattern mask.

8. A mask frame assembly for depositing a thin film of a flat panel display, the mask frame assembly comprising:

a frame including a first opening;

a first mask including a plurality of second openings arranged in rows and columns, the rows being formed in a first direction and the columns being formed in a second direction, the second openings arranged such that they fit within the area defined by the perimeter of the first opening; and

a second mask including a plurality of unit pattern masks, wherein each unit pattern mask includes a plurality of mask pattern units that correspond to the plurality of second openings of the first mask;

wherein a tensile force is applied to each unit pattern mask by fixing the ends of each unit pattern mask to the first mask in the first direction.

9. The assembly of claim 8, wherein each unit pattern mask includes a plurality of mask pattern units that correspond to a row of the second openings of the first mask.

10. The assembly of claim 9, wherein each mask pattern unit includes a plurality of third openings that are elongated and partially extend across the width of the unit pattern mask and arranged along a portion of the length of the unit pattern mask.

11. The assembly of claim 9, wherein each mask pattern unit includes a plurality of third openings having the same pattern as the portion of a thin film corresponding to a flat panel display.

12. The assembly of claim 8, wherein the unit pattern mask is elongated and attached to the first mask in the first direction of the first mask.

13. The assembly of claim 12, wherein the unit pattern mask includes a plurality of mask pattern units corresponding to a row of second openings.

14. The assembly of claim 13, wherein each mask pattern unit includes a plurality of elongated slots, the length of the slots partially extending across the width of a unit pattern mask.