Apparatus and method for dynamic diagnostic testing of integrated circuits
First Claim
1. A method for measuring electrical characteristics of an integrated circuit, the integrated circuit comprising predetermined patterns of active electronic elements disposed on a surface of a semiconductor wafer, the method comprising:
- injecting a test signal into the integrated circuit by stimulating a predetermined area of the integrated circuit;
supplying power to at least one of the active electronic elements of the integrated circuit;
detecting an electrical activity within the integrated circuit in response to the injected test signal, wherein the responsive electrical activity comprises switching of at least one of the active electronic elements of the integrated circuit; and
determining the characteristics of the integrated circuit based on the detected electrical activity.
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Accused Products
Abstract
Systems and methods consistent with principles of the present invention allow contactless measuring of various kinds of electrical activity within an integrated circuit. The invention can be used for high-bandwidth, at speed testing of various devices on a wafer during the various stages of device processing, or on packaged parts at the end of the manufacturing cycle. Power is applied to the test circuit using conventional mechanical probes or other means, such as CW laser light applied to a photoreceiver provided on the test circuit. The electrical test signal is introduced into the test circuit by stimulating the circuit using a contactless method, such as by directing the output of one or more modelocked lasers onto high-speed receivers on the circuit, or by using a high-speed pulsed diode laser. The electrical activity within the circuit in response to the test signal is sensed by a receiver element, such as a time-resolved photon counting detector, a static emission camera system, or by an active laser probing system. The collected information is used for a variety of purposes, including manufacturing process monitoring, new process qualification, and model verification.
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Citations
62 Claims
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1. A method for measuring electrical characteristics of an integrated circuit, the integrated circuit comprising predetermined patterns of active electronic elements disposed on a surface of a semiconductor wafer, the method comprising:
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injecting a test signal into the integrated circuit by stimulating a predetermined area of the integrated circuit;
supplying power to at least one of the active electronic elements of the integrated circuit;
detecting an electrical activity within the integrated circuit in response to the injected test signal, wherein the responsive electrical activity comprises switching of at least one of the active electronic elements of the integrated circuit; and
determining the characteristics of the integrated circuit based on the detected electrical activity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56)
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57. A method for measuring electrical characteristics of an integrated circuit, the integrated circuit comprising predetermined patterns of active electronic elements disposed on a surface of a semiconductor wafer, the method comprising:
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step of injecting a test signal into the integrated circuit by stimulating a predetermined area of the integrated circuit;
step of supplying power to at least one of the active electronic elements of the integrated circuit;
step of detecting an electrical activity within the integrated circuit in response to the injected test signal, wherein the responsive electrical activity comprises switching of at least one of the active electronic elements of the integrated circuit; and
step of determining the characteristics of the integrated circuit based on the detected electrical activity.
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58. A method for measuring electrical characteristics of an integrated circuit, the integrated circuit comprising predetermined patterns of active electronic elements disposed on a surface of a semiconductor wafer, the method comprising:
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irradiating the integrated circuit with an energy beam, the irradiating causing creation of a test signal in the integrated circuit;
supplying power to at least one of the active electronic elements of the integrated circuit;
registering energy emission from the integrated circuit with a detector, the registered energy emission being indicative of an electrical activity within the integrated circuit caused by the injected test signal, wherein the responsive electrical activity comprises switching of at least one of the active electronic elements of the integrated circuit; and
determining the characteristics of the integrated circuit based on the registered energy emission. - View Dependent Claims (59, 60, 61, 62)
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Specification