Interferometric modulator array with integrated MEMS electrical switches
First Claim
Patent Images
1. A display device comprising:
- a MEMS display portion comprising rows and columns of MEMS display elements; and
a plurality of MEMS switches formed as one or more additional rows or columns of MEMS switch elements adjacent to said display portion.
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Abstract
An interferometric modulator array is integrated with collapsible cavity MEMS electrical switches. The electrical switches may have similar physical geometry as the display elements. The switches may form row or column select functions for the display.
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Citations
14 Claims
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1. A display device comprising:
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a MEMS display portion comprising rows and columns of MEMS display elements; and
a plurality of MEMS switches formed as one or more additional rows or columns of MEMS switch elements adjacent to said display portion. - View Dependent Claims (2, 3, 4, 8, 9, 10, 11, 12)
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5. A method of making a MEMS display device, the method comprising:
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forming rows and columns of MEMS display elements on a substrate; and
forming one or more rows or columns of MEMS switches on the same or a different substrate, wherein at least some of said MEMS switches are coupled to the display. - View Dependent Claims (6, 7)
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13. A display device configured to display an image based on data, the device comprising:
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means for displaying the image comprising rows and columns of MEMS display elements; and
means for switching data to the means for displaying comprising a plurality of MEMS switches formed as one or more additional rows or columns of MEMS switch elements adjacent to said display portion. - View Dependent Claims (14)
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Specification