Pattern generator
First Claim
1. An apparatus for creating a pattern on a workpiece sensitive to light radiation, comprising:
- a light source for emitting light flashes in the wavelength range from EUV to IR, a spatial light modulator (SLM) having a multitude of modulating elements (pixels), adapted to being illuminated by said radiation a projection system creating an image of the modulator on the workpiece, an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting said pattern to modulator signals, and feeding said signals to the modulator, a precision mechanical system for positioning said workpiece and/or projection system relative to each other an electronic control system controlling the position of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is printed on the workpiece, wherein said electronic control system is further arranged to control a timing of a trigger signal to the light source for emitting the light flashes, said trigger signal being controlled in order to compensate for flash-to-flash time jitter in said light source.
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Abstract
The present invention relates to an apparatus for creating a pattern on a workpiece sensitive to radiation, such as a photomask a display panel or a microoptical device. The apparatus may include a source for emitting light flashes, a spatial modulator having modulating elements (pixels), adapted to being illuminated by the radiation, and a projection system creating an image of the modulator on the workpiece. It may further include an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting the pattern to modulator signals, and feeding the signals to the modulator. An electronic control system may be provided to control a trigger signal to compensate for flash-to-flash time jitter in the light source.
29 Citations
19 Claims
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1. An apparatus for creating a pattern on a workpiece sensitive to light radiation, comprising:
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a light source for emitting light flashes in the wavelength range from EUV to IR, a spatial light modulator (SLM) having a multitude of modulating elements (pixels), adapted to being illuminated by said radiation a projection system creating an image of the modulator on the workpiece, an electronic data processing and delivery system receiving a digital description of the pattern to be written, converting said pattern to modulator signals, and feeding said signals to the modulator, a precision mechanical system for positioning said workpiece and/or projection system relative to each other an electronic control system controlling the position of the workpiece, the feeding of the signals to the modulator and the intensity of the radiation, so that said pattern is printed on the workpiece, wherein said electronic control system is further arranged to control a timing of a trigger signal to the light source for emitting the light flashes, said trigger signal being controlled in order to compensate for flash-to-flash time jitter in said light source. - View Dependent Claims (2, 3, 4, 5)
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6. A method for creating a pattern on a workpiece sensitive to light radiation, comprising:
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emitting light flashes in the wavelength range from EUV to IR, modulating the emitted light with a spatial light modulator (SLM) having a multitude of modulating elements (pixels), projecting an image of the modulator on the workpiece, controlling the emitted radiation, the modulator and the positioning of the workpiece in relation to the projected image, based on a digital description of the pattern to be written, so that said pattern is printed on the workpiece, wherein controlling of the emitted radiation involves controlling of a timing of a trigger signal for emitting the light flashes in order to compensate for flash-to-flash time jitter. - View Dependent Claims (7, 8)
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9. An apparatus for creating a pattern on a workpiece sensitive to light radiation, comprising:
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a light source for emitting light flashes in the wavelength range from EUV to IR, a spatial light modulator (SLM) having a multitude of individually controllable modulating elements (pixels), adapted to being illuminated by said radiation a projection system for creating an image of the modulator on the workpiece, and an electronic control system controlling the position of the image created on the workpiece, the modulation elements of the modulator and the intensity of the radiation, in accordance with an intended pattern to be printed, wherein said electronic control system is further arranged to control a timing of a trigger signal to the light source for emitting the light flashes in order to compensate for flash-to-flash time jitter in said light source. - View Dependent Claims (10, 11, 12, 13)
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14. An apparatus for creating a pattern on a photosensitive workpiece, comprising:
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a light source for emitting light flashes in the wavelength range from EUV to IR, a projection system for directing the emitted light to the workpiece, and a control system arranged to control a trigger signal to the light source for emitting the light flashes, wherein a timing of the trigger signal is controlled in order to compensate for flash-to-flash time jitter in said light source. - View Dependent Claims (15, 16)
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17. A method for creating a pattern on a workpiece sensitive to light radiation, comprising:
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emitting light flashes in the wavelength range from EUV to IR, projecting the emitted light on the workpiece, controlling a trigger signal for emitting the light flashes in order to compensate for flash-to-flash time jitter. - View Dependent Claims (18, 19)
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Specification