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Apparatus and methods for verifying the location of areas of interest within a sample in an imaging system

  • US 20060104499A1
  • Filed: 12/29/2005
  • Published: 05/18/2006
  • Est. Priority Date: 10/29/1999
  • Status: Abandoned Application
First Claim
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1. A method for verifying a location of an area of interest within a sample, the method comprising the steps of:

  • a) locating a datum mark on the sample;

    b) identifying the area of interest within a sample;

    c) determining the location of the area of interest relative to the mark; and

    d) locating again the datum, wherein the location of the area of interest is verified if a dimensional error in locating the datum in step d relative to step a is less than a tolerance value.

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