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Methods for reducing evaporation in wet processing steps

  • US 20060105356A1
  • Filed: 11/18/2004
  • Published: 05/18/2006
  • Est. Priority Date: 11/18/2004
  • Status: Abandoned Application
First Claim
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1. A method of contacting a surface of an object with an agent, said method comprising:

  • (a) positioning said object in a reaction chamber; and

    (b) flowing a liquid comprising said agent in a solvent across said surface of said object in said reaction chamber, wherein said liquid is flowed across said surface at least partially in the presence of a gas that limits evaporation of said solvent;

    thereby contacting said surface of said object with said agent.

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