Method for eliminating low frequency error sources to critical dimension uniformity in shaped beam writing systems

• US 20060108547A1
• Filed: 11/22/2004
• Published: 05/25/2006
• Est. Priority Date: 11/22/2004
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Buller, Benyamin
• Granted Patent: US 7,105,844 B2
• Time in Patent Office: Days
• US Class Current: 250/492.230
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: H01J 2237/31776 Shaped beam
• CPC Class Codes: H01J 37/3026 Patterning strategy
• CPC Class Codes: H01J 37/3174 Particle-beam lithography, e.g. electron beam lithography

Abstract

A method and system for generating flashes on a substrate. The method includes receiving one or more figures of a pattern to be printed on the substrate and decomposing each figure into at least four substantially rectangular shapes. The four substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary. The method further includes generating a flash for each substantially rectangular shape such that each edge of each figure is an image of the same aperture.

Claims

1. A method for generating flashes on a substrate, comprising:

receiving one or more figures of a pattern to be printed on the substrate;

decomposing each figure into at least four substantially rectangular shapes, wherein the four substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary; and

generating a flash for each substantially rectangular shape, wherein the flashes are generated to form each figure such that the edges of each figure are an image of a first aperture.

3. The method of claim 1, further comprising forwarding the at least four substantially rectangular shapes and information associated therewith to a flash generator, wherein the information comprises at least one of a side descriptor for identifying each side of each substantially rectangular shape as one of internal and external, a vertical size and a horizontal size of each substantially rectangular shape, and a vertical offset and a horizontal offset of each substantially rectangular shape, wherein an internal side is defined as a side that does not correspond to an edge of a figure and an external side is defined as a side that corresponds to an edge of a figure.

4. The method of claim 1, further comprising generating signals that control an operation of at least one of a shape deflector and a vector deflector.

5. The method of claim 3, wherein generating the flash comprises generating the flash for each substantially rectangular shape using the information associated with the substantially rectangular shape.

6. The method of claim 1, wherein the first aperture is a lower aperture.

7. The method of claim 1, wherein the first aperture is an upper aperture.

8. The method of claim 3, wherein generating the flash comprises shaping an electron beam such that an image of an upper aperture is imaged on a lower aperture according to at least one of the side descriptor, the vertical size and the horizontal size of the substantially rectangular shape.

9. The method of claim 8, wherein generating the flash comprises moving the shaped electron beam according to the horizontal offset and the vertical offset.

10. The method of claim 8, wherein shaping the electron beam comprises moving the electron beam such that a right side of the image projected on the lower aperture is a horizontal size distance to the right of a left side of the lower aperture, if a right side of the substantially rectangular shape is identified as internal.

11. The method of claim 8, wherein shaping the electron beam comprises moving the electron beam such that a left side of the image projected on the lower aperture is a horizontal size distance to the left of a right side of the lower aperture, if a right side of the substantially rectangular shape is identified as external.

12. The method of claim 8, wherein shaping the electron beam comprises moving the electron beam such that a top side of the image projected on the lower aperture is a vertical size distance above a bottom side of the lower aperture, if a top side of the substantially rectangular shape is identified as internal.

13. The method of claim 8, wherein shaping the electron beam comprises moving the electron beam such that a bottom side of the image projected on the lower aperture is a vertical size distance below a top side of the lower aperture, if a top side of the substantially rectangular shape is identified as external.

14. The method of claim 9, wherein moving the shaped electron beam comprises moving the shaped electron beam vertically by the vertical offset, if a top side of the substantially rectangular shape is identified as internal.

15. The method of claim 9, wherein moving the shaped electron beam comprises moving the shaped electron beam vertically by the vertical offset minus a vertical size of the lower aperture, if a top side of the substantially rectangular shape is identified as external.

16. The method of claim 9, wherein moving the shaped electron beam comprises moving the shaped electron beam horizontally by the horizontal offset, if a right side of the substantially rectangular shape is identified as internal.

17. The method of claim 9, wherein moving the shaped electron beam comprises moving the shaped electron beam horizontally by the horizontal offset minus a horizontal size of the lower aperture, if a right side of the substantially rectangular shape is identified as external.

2. (canceled)

18. An apparatus for writing flashes on a substrate, comprising:

a data processing system configured to receive one or more figures of a pattern and decompose each figure into at least four substantially rectangular shapes, wherein the substantially rectangular shapes are separated by at least one horizontal boundary and at least one vertical boundary;

a flash generator coupled to the data processing system, wherein the flash generator is configured to generate signals that control an operation of one or more deflectors of an energy beam column; and

an energy beam column having a first aperture and a second aperture, wherein the energy beam column is coupled to the flash generator and wherein the energy beam column is configured to generate a flash for each substantially rectangular shape in response to the generated signals, wherein the flashes are generated to form each figure such that the edges of each figure are an image of the first aperture.

20. The apparatus of claim 18, wherein the data processing system is further configured to forward the at least four substantially rectangular shapes and information associated therewith to the flash generator, wherein the information comprises at least one of a side descriptor for identifying each side of each substantially rectangular shape as one of internal and external, a vertical size and a horizontal size of each substantially rectangular shape, and a vertical offset and a horizontal offset of each substantially rectangular shape, wherein an internal side is defined as a side that does not correspond to an edge of a figure and an external side is defined as a side that corresponds to an edge of a figure.

21. The apparatus of claim 20, wherein the energy beam column comprises a shape deflector configured to shape an energy beam such that an image of the second aperture is projected on the first aperture according to at least one of the side descriptor, the vertical size and the horizontal size.

22. The apparatus of claim 20, wherein the energy beam column comprises:

a shape deflector configured to shape an energy beam such that an image of the second aperture is projected on the first aperture according to at least one of the side descriptor, the vertical size and the horizontal size; and

a vector deflector configured to move the shaped energy beam according to at least one of the horizontal offset and the vertical offset.

23. The apparatus of claim 18, wherein the first aperture is a lower aperture and the second aperture is an upper aperture.

24. The apparatus of claim 18, wherein the energy beam column is selected from the group of an electron beam column, an ion beam column, and a laser beam column.

19. (canceled)