Surface texture measuring instrument
First Claim
1. A surface texture measuring instrument provided with a near-field measuring unit including a near-field probe that forms a near-field light at a tip end thereof when a laser beam is irradiated, a laser source that generates the laser beam to be irradiated on the near-field probe, a detection element that detects scattering effect of the near-field light generated when the near-field probe is moved close to a workpiece, and an actuator that displaces the near-field probe and the workpiece in a direction moving close to/away from each other, comprising:
- a laser length-measuring unit that measures a relative distance between a reference position and the workpiece in the vicinity of the tip end of the near-field probe or a relative distance between the reference position and the near-field probe.
1 Assignment
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Accused Products
Abstract
A surface texture measuring instrument provided with a near-field measuring unit (30) including a near-field probe (33) that forms a near-field light at a tip end thereof when a laser beam is irradiated, a laser source (35) that generates the laser beam to be irradiated on the near-field probe (33), a detection element (38) that detects scattering effect of the near-field light generated when the near-field probe (33) is moved close to a workpiece (1), and an actuator (32) that displaces the near-field probe (33) and the workpiece (1) in a direction moving close to/away from each other, includes: a laser length-measuring unit (20) that measures a relative distance between a reference position and the workpiece (1) in the vicinity of the tip end of the near-field probe (33) or a relative distance between the reference position and the near-field probe (33).
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Citations
7 Claims
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1. A surface texture measuring instrument provided with a near-field measuring unit including a near-field probe that forms a near-field light at a tip end thereof when a laser beam is irradiated, a laser source that generates the laser beam to be irradiated on the near-field probe, a detection element that detects scattering effect of the near-field light generated when the near-field probe is moved close to a workpiece, and an actuator that displaces the near-field probe and the workpiece in a direction moving close to/away from each other, comprising:
- a laser length-measuring unit that measures a relative distance between a reference position and the workpiece in the vicinity of the tip end of the near-field probe or a relative distance between the reference position and the near-field probe.
- View Dependent Claims (2, 3, 4, 5, 6, 7)
Specification