Pattern generator using a dual phase step element and method of using same
First Claim
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1. A system, comprising:
- an illumination system that supplies a beam of radiation;
an array of individually controllable elements that patterns the beam, the array of individually controllable elements comprising mirrors having first and second steps on opposite edges; and
a projection system that projects the patterned beam onto a target portion of an object.
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Abstract
A system and method are used to pattern light using an illumination system, an array of individually controllable components, and a projection system. The illumination system supplies a beam of radiation. The array of individually controllable elements patterns the beam. The array of individually controllable elements comprises mirrors having first and second steps on opposite edges. The projection system projects the patterned beam onto a target portion of an object. In various examples, the object can be a display, a semiconductor substrate or wafer, a flat panel display glass substrate, or the like, as is discussed in more detail below.
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Citations
40 Claims
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1. A system, comprising:
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an illumination system that supplies a beam of radiation;
an array of individually controllable elements that patterns the beam, the array of individually controllable elements comprising mirrors having first and second steps on opposite edges; and
a projection system that projects the patterned beam onto a target portion of an object. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 30)
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14. A patterning device, comprising:
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an array of first reflective components, each of the first reflecting components having a first width and a first length;
an array of second reflective components, wherein respective ones of the array of second reflective components are coupled to a central portion of respective ones of the array of first reflective components, each of the second reflective components having a second width, which is substantially equal to the first width, and a second length, which is smaller than the first length, such that first steps are formed between first edges of respective ones of the coupled together first and second reflective components and second steps are formed between second edges of respective ones of the coupled together first and second reflective components; and
an array of controllers coupled to respective ones of the coupled together first and second reflective components, each of the controllers controlling the movement of each of the respective ones of the coupled together first and second reflective components. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 31)
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23. A method, comprising:
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patterning a beam of radiation using an array of individually controllable elements, each element in the array having first and second steps on opposite edges; and
projecting the patterned beam onto a target portion of an object. - View Dependent Claims (24, 25, 26, 27, 28, 29)
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32. A patterning device, comprising:
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an array of first reflective components, each of the first reflecting components having a first width and a first length;
an array of second reflective components, wherein respective ones of the array of second reflective components are coupled to a peripheral portion of respective ones of the array of first reflective components, each of the second reflective components having a second width, which is substantially equal to the first width, and a second length, which is smaller than the first length, such that first steps are formed between first edges of respective ones of the coupled together first and second reflective components and second steps are formed between second edges of respective ones of the coupled together first and second reflective components; and
an array of controllers coupled to respective ones of the coupled together first and second reflective components, each of the controllers controlling the movement of each of the respective ones of the coupled together first and second reflective components. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40)
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Specification