Apparatus for forming a striation reduced chemical mechanical polishing pad
First Claim
1. An apparatus for forming a chemical mechanical polishing pad, comprising:
- a tank with polymeric materials;
a storage silo with microspheres;
a curative storage tank with curing agents;
a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres;
a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;
a premix run tank for storing the pre-mixture;
a mixer for forming a mixture of the pre-mixture and the curing agents; and
a mold for molding the mixture.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention provides an apparatus for forming a chemical mechanical polishing pad, comprising a tank with polymeric materials, a storage silo with microspheres and a curative storage tank with curing agents. The apparatus further provides a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres and a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached. The apparatus further provides a premix run tank for storing the pre-mixture, a mixer for forming a mixture of the pre-mixture and the curing agents and a mold for molding the mixture.
-
Citations
10 Claims
-
1. An apparatus for forming a chemical mechanical polishing pad, comprising:
-
a tank with polymeric materials;
a storage silo with microspheres;
a curative storage tank with curing agents;
a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres;
a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;
a premix run tank for storing the pre-mixture;
a mixer for forming a mixture of the pre-mixture and the curing agents; and
a mold for molding the mixture. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. An apparatus for forming a chemical mechanical polishing pad, comprising:
-
a first prepolymer storage tank with first polymeric materials;
a storage silo with microspheres;
a curative storage tank with curing agents;
a premix prep tank for forming a pre-mixture of the first polymeric materials and the microspheres;
a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;
a premix run tank for storing the pre-mixture;
a mixer for forming a mixture of the pre-mixture and the curing agents;
at least a second prepolymer storage tank with second polymeric materials for providing the second polymeric materials to the mixture until a desired bulk density is reached; and
a mold for molding the mixture. - View Dependent Claims (8)
-
-
9. An apparatus for forming a chemical mechanical polishing pad, comprising:
-
a prepolymer storage tank with polymeric materials;
a storage silo with microspheres;
a curative storage tank with curing agents;
a premix run/prep tank for forming a pre-mixture of the polymeric materials and the microspheres;
a recirculation loop in the premix run/prep tank for recirculating the pre-mixture until a desired bulk density is reached;
a mixer for forming a mixture of the pre-mixture and the curing agents; and
a mold for molding the mixture. - View Dependent Claims (10)
-
Specification