Data processing equipment, inspection assistance system, and data processing method
First Claim
1. A data processing apparatus for performing transfer/reception of information and images with an review tool, said review tool acquiring images of outward appearance of defects based on inspection result file from an inspection tool, said inspection tool detecting said defects of a target to be detected and outputting said inspection result file regarding defect information, and displaying, on a display window, the defect information from said inspection tool and defect information from said review tool including said images in such a manner that both of the defect information are arranged side by side.
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Accused Products
Abstract
A data processing apparatus, which is connected to an inspection tool and an review tool via a network, automatically receives inspection result file regarding defect information from the inspection tool and image information from the review tool. Moreover, the data processing apparatus makes comparative check between the defect, image, and attribute information outputted from the inspection tool and the defect, image, and attribute information observed in the review tool. Finally, the data processing apparatus displays, on its window, both of the above-described information in a manner of being organized and arranged side by side.
20 Citations
17 Claims
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1. A data processing apparatus for
performing transfer/reception of information and images with an review tool, said review tool acquiring images of outward appearance of defects based on inspection result file from an inspection tool, said inspection tool detecting said defects of a target to be detected and outputting said inspection result file regarding defect information, and displaying, on a display window, the defect information from said inspection tool and defect information from said review tool including said images in such a manner that both of the defect information are arranged side by side.
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12. An inspection-operation assistance system, comprising:
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an inspection tool for detecting defects of a target to be detected, and outputting inspection result file regarding defect information, an review tool for acquiring images of outward appearance of said defects based on the defect information, and a data processing apparatus for performing transfer/reception of information and images with said inspection tool and said review tool, and displaying, on a display window, the defect information from said inspection tool and the defect information from said review tool including said images in such a manner that both of the defect information are arranged side by side. - View Dependent Claims (13, 14)
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15. A data processing method, comprising the steps of:
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performing transfer/reception of information and images with an review tool, said review tool acquiring images of outward appearance of defects based on defect information from an inspection tool, said inspection tool detecting said defects of a target to be detected and outputting inspection result file regarding the defect information, and displaying, on a display window, the defect information from said inspection tool and defect information from said review tool including said images in such a manner that both of said defect information are arranged side by side. - View Dependent Claims (16, 17)
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Specification