Data processing equipment, inspection assistance system, and data processing method

• US 20060111879A1
• Filed: 11/15/2005
• Published: 05/25/2006
• Est. Priority Date: 11/19/2004
• Status: Active Grant

• Current Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Original Assignee: Hitachi High-Technologies Corporation (Hitachi, Ltd.)
• Inventors: Funakoshi, Tomohiro
• Granted Patent: US 7,606,409 B2
• Time in Patent Office: Days
• US Class Current: 703/1
• CPC Class Codes: G07C 3/146 during manufacturing process

Abstract

A data processing apparatus, which is connected to an inspection tool and an review tool via a network, automatically receives inspection result file regarding defect information from the inspection tool and image information from the review tool. Moreover, the data processing apparatus makes comparative check between the defect, image, and attribute information outputted from the inspection tool and the defect, image, and attribute information observed in the review tool. Finally, the data processing apparatus displays, on its window, both of the above-described information in a manner of being organized and arranged side by side.

Claims

1. A data processing apparatus for

performing transfer/reception of information and images with an review tool, said review tool acquiring images of outward appearance of defects based on inspection result file from an inspection tool, said inspection tool detecting said defects of a target to be detected and outputting said inspection result file regarding defect information, and

displaying, on a display window, the defect information from said inspection tool and defect information from said review tool including said images in such a manner that both of the defect information are arranged side by side.

2. The data processing apparatus according to claim 1, wherein said data processing apparatus selects at least one selection condition used when selecting the defect information to be displayed on said display window, or arbitrarily combines selection conditions through said selection.

3. The data processing apparatus according to claim 2, wherein at least said one selection condition is selected based on coordinate data on said defects detected by said inspection tool.

4. The data processing apparatus according to claim 2, wherein at least said one selection condition is determined based on the presence or absence of said images of said defects acquired by said review tool.

5. The data processing apparatus according to claim 1, wherein said data processing apparatus displays, on said display window, defect attribute parameters of said defects as the defect information outputted from said inspection tool.

6. The data processing apparatus according to claim 5, wherein said defect attribute parameters are acquired using a plurality of inspection conditions.

7. The data processing apparatus according to claim 1, wherein said data processing apparatus displays, on said display window, said images of said defects as the defect information outputted from said inspection tool.

8. The data processing apparatus according to claim 7, wherein said images of said defects are acquired using a plurality of inspection conditions.

9. The data processing apparatus according to claim 1, wherein said data processing apparatus displays, on said display window, classification information on said defects classified by said review tool based on the defect information from said inspection tool.

10. The data processing apparatus according to claim 1, wherein

said inspection result file outputted from said inspection tool includes at least said images and attribute parameters of said defects of said target to be detected,

said review tool classifying said defects based on the defect information,

said defect information from said review tool including said images including classification information on said defects.

11. The data processing apparatus according to claim 1, wherein the defect information from said inspection tool to be displayed on said display window corresponds to information of the defect which said review tool acquires.

12. An inspection-operation assistance system, comprising:

an inspection tool for detecting defects of a target to be detected, and outputting inspection result file regarding defect information,

an review tool for acquiring images of outward appearance of said defects based on the defect information, and

a data processing apparatus for performing transfer/reception of information and images with said inspection tool and said review tool, and displaying, on a display window, the defect information from said inspection tool and the defect information from said review tool including said images in such a manner that both of the defect information are arranged side by side.

13. The inspection-operation assistance system according to claim 12, wherein the defect information outputted from said inspection tool includes at least said images and attribute parameters of said defects of said target to be detected,

said review tool classifying said defects based on the defect information,

the defect information from said review tool including said images including classification information on said defects.

14. The inspection-operation assistance system according to claim 12, wherein the defect information from said inspection tool to be displayed on said display window corresponds to information of the defect which said review tool acquires.

15. A data processing method, comprising the steps of:

performing transfer/reception of information and images with an review tool, said review tool acquiring images of outward appearance of defects based on defect information from an inspection tool, said inspection tool detecting said defects of a target to be detected and outputting inspection result file regarding the defect information, and

displaying, on a display window, the defect information from said inspection tool and defect information from said review tool including said images in such a manner that both of said defect information are arranged side by side.

16. The data processing method according to claim 15, wherein the defect information outputted from said inspection tool includes at least said images and attribute parameters of said defects of said target to be detected,

said review tool classifying said defects based on the defect information,

the defect information from said review tool including said images including classification information on said defects.

17. The data processing method according to claim 15, wherein the defect information from said inspection tool to be displayed on said display window corresponds to information of the defect which said review tool acquires.