Accelerometer
First Claim
1. An accelerometer having a plate-like base made from an electrically non-conductive material, an outer substantially planar, ring-like, support frame fixedly bonded to the base, an inner substantially planar, ring-like, support frame flexibly suspended within the outer frame by mounts connecting the inner frame to the outer frame so that the inner frame is spaced from the base and co-planar with the outer support frame, a substantially planar plate-like proof mass moveably mounted in the inner support frame which is co-planar therewith, four or more flexible mounting legs each co-planar with the proof mass and inner support frame, with each mounting leg being connected at one end to the proof mass and connected at another end to the inner support frame so that the proof mass is mounted for linear movement in a sensing direction in the plane containing the outer support frame, inner support frame, proof mass and mounting legs, in response to acceleration change applied to the accelerometer, with the mounting legs extending substantially perpendicularly to the sensing direction, and with the flexible suspension of the inner support frame reducing compressive and/or tensile forces on the mounting legs as a function of temperature on the accelerometer.
3 Assignments
0 Petitions
Accused Products
Abstract
The accelerometer has a base (2), an outer planar ring-like support frame (17) fixedly bonded to the base (2), and an inner planar ring-like support frame (18) flexibly suspended within the outer frame (17) by mounts (19) connecting the inner frame (18) to the outer frame (17) so that the inner frame (18) is spaced from the base (2), co-planar with the outer support frame (17) so as to provide flexible suspension for the inner support frame (18) reducing compressive and/or tensile forces on mounting legs (4) flexibly mounting a proof mass (3) in the inner support frame (18).
31 Citations
19 Claims
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1. An accelerometer having
a plate-like base made from an electrically non-conductive material, an outer substantially planar, ring-like, support frame fixedly bonded to the base, an inner substantially planar, ring-like, support frame flexibly suspended within the outer frame by mounts connecting the inner frame to the outer frame so that the inner frame is spaced from the base and co-planar with the outer support frame, a substantially planar plate-like proof mass moveably mounted in the inner support frame which is co-planar therewith, four or more flexible mounting legs each co-planar with the proof mass and inner support frame, with each mounting leg being connected at one end to the proof mass and connected at another end to the inner support frame so that the proof mass is mounted for linear movement in a sensing direction in the plane containing the outer support frame, inner support frame, proof mass and mounting legs, in response to acceleration change applied to the accelerometer, with the mounting legs extending substantially perpendicularly to the sensing direction, and with the flexible suspension of the inner support frame reducing compressive and/or tensile forces on the mounting legs as a function of temperature on the accelerometer.
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19. (canceled)
Specification