Semiconductor processing apparatus
First Claim
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1. A semiconductor processing apparatus, comprising:
- a chamber in which a process is performed;
a gas supply to supply reactant gas to the chamber;
a gas dispenser having a plurality of nozzles to inject the reactant gas into the chamber; and
a gas distribution route formed in the gas dispenser to uniformly distribute the reactant gas supplied by the gas supply to the nozzles.
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Abstract
A semiconductor processing apparatus, designed to inject reactant gas with uniform pressure and flux therein, includes a chamber in which a process is performed, a gas supply to supply reactant gas to the chamber, a gas dispenser having a plurality of nozzles to inject the reactant gas into the chamber, and a gas distribution route formed in the gas dispenser to uniformly distribute the reactant gas supplied from the gas supply to the nozzles.
39 Citations
21 Claims
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1. A semiconductor processing apparatus, comprising:
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a chamber in which a process is performed;
a gas supply to supply reactant gas to the chamber;
a gas dispenser having a plurality of nozzles to inject the reactant gas into the chamber; and
a gas distribution route formed in the gas dispenser to uniformly distribute the reactant gas supplied by the gas supply to the nozzles. - View Dependent Claims (2, 3)
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4. A semiconductor processing apparatus, comprising:
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at least one gas supply to supply reactant gas into a chamber;
a ring-shaped gas dispenser constituting a portion of a side surface of the chamber;
a plurality of gas nozzles arranged in a radial direction on an inner surface of the gas dispenser; and
at least one gas distribution route formed in the gas dispenser to uniformly distribute the reactant gas supplied from the gas supply to the nozzles. - View Dependent Claims (5, 6, 7, 8)
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9. A semiconductor processing apparatus, comprising:
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a chamber including upper and lower portions;
a gas dispenser disposed between the upper and lower portions of the chamber and including plural nozzles to inject reactant gas into the chamber; and
at least one gas distribution route including plural consecutive channels to uniformly distribute a reactant gas to the gas dispenser. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A semiconductor processing apparatus, comprising:
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a reaction chamber;
a gas supply to supply gas;
a plurality of nozzles to deposit the gas into the reaction chamber;
a plurality of gas distribution channels to uniformly distribute the gas supplied by the gas supply around a circumference of the reaction chamber; and
a nozzle communication channel communicating with the plurality of gas distribution channels and the nozzles to transfer the distributed gas to the plurality of nozzles. - View Dependent Claims (17, 18)
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19. A semiconductor processing apparatus, comprising:
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a cylindrical reaction chamber;
a plurality of gas supplies to supply a plurality of reactant gases; and
a plurality of gas distribution units to uniformly distribute the reactant gases supplied by the gas supplies, each gas distribution unit comprising;
a gas inlet to communicate with the respective gas supply to introduce the respective reactant gas supplied by the respective gas supply;
a plurality of ring-shaped channels disposed around a circumference of the cylindrical reaction chamber to uniformly distribute the respective reactant gas around the circumference of the cylindrical reaction chamber; and
a plurality of nozzles disposed around the circumference of the cylindrical reaction chamber and communicating with one of the plurality of ring-shaped channels to deposit the uniformly distributed respective reactant gas into the cylindrical reaction chamber such that the respective reactant gas is distributed uniformly through each of the nozzles. - View Dependent Claims (20, 21)
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Specification