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Wafer transfer mechanism

  • US 20060113806A1
  • Filed: 11/29/2004
  • Published: 06/01/2006
  • Est. Priority Date: 11/29/2004
  • Status: Abandoned Application
First Claim
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1. A transfer mechanism for transferring a workpiece, comprising:

  • an arm member comprising a tip projection provided at a tip end thereof for contacting a periphery of the workpiece and restricting movement of the workpiece, said arm member further comprising multiple supporting projections protruding from a top surface thereof for contacting and supporting a back side of the workpiece;

    a movement mechanism for reciprocating the arm member with the workpiece supported thereon between a retracted position and an extended position; and

    a positioning member for contacting a periphery of the workpiece and moving the workpiece relative to the arm member for sandwiching the workpiece between the tip projection and the position member when the arm member moves to the retracted position, wherein when the workpiece moves relative to the arm member, the workpiece slides on the supporting projections.

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