Wafer transfer mechanism
First Claim
Patent Images
1. A transfer mechanism for transferring a workpiece, comprising:
- an arm member comprising a tip projection provided at a tip end thereof for contacting a periphery of the workpiece and restricting movement of the workpiece, said arm member further comprising multiple supporting projections protruding from a top surface thereof for contacting and supporting a back side of the workpiece;
a movement mechanism for reciprocating the arm member with the workpiece supported thereon between a retracted position and an extended position; and
a positioning member for contacting a periphery of the workpiece and moving the workpiece relative to the arm member for sandwiching the workpiece between the tip projection and the position member when the arm member moves to the retracted position, wherein when the workpiece moves relative to the arm member, the workpiece slides on the supporting projections.
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Accused Products
Abstract
A transfer mechanism for transferring a workpiece includes an arm member including a tip projection provided at a tip end thereof for contacting a periphery of the workpiece and restricting movement of the workpiece. The arm member further includes multiple supporting projections protruding from a top surface thereof for contacting and supporting a back side of the workpiece.
412 Citations
29 Claims
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1. A transfer mechanism for transferring a workpiece, comprising:
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an arm member comprising a tip projection provided at a tip end thereof for contacting a periphery of the workpiece and restricting movement of the workpiece, said arm member further comprising multiple supporting projections protruding from a top surface thereof for contacting and supporting a back side of the workpiece;
a movement mechanism for reciprocating the arm member with the workpiece supported thereon between a retracted position and an extended position; and
a positioning member for contacting a periphery of the workpiece and moving the workpiece relative to the arm member for sandwiching the workpiece between the tip projection and the position member when the arm member moves to the retracted position, wherein when the workpiece moves relative to the arm member, the workpiece slides on the supporting projections. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 21, 22, 23)
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14. An arm member for carrying a semiconductor substrate, comprising:
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a Y-shaped portion having a shaft and two blades branching from the shaft for supporting a substrate;
a tip projection provided at a tip end of each blade for contacting a periphery of the substrate and restricting movement of the substrate; and
multiple supporting projections protruding from a top surface of the Y-shaped portion for contacting and supporting a back side of the substrate, said supporting projections being comprised of first supporting projections and second supporting projections, said first supporting projections comprising a distal supporting projection disposed in the vicinity of the tip end of each blade near an outer edge of the blade and a proximate supporting projection disposed in the vicinity of a bottom of each blade near the outer edge of the blade, said second supporting projections having a height greater than the proximate supporting projections and being disposed generally between the proximate supporting projections and outside a curved line defined by a periphery of the substrate passing through the proximate supporting projections, wherein the substrate can be placed between the second supporting projections and the tip projections when the substrate is supported on the first supporting projections. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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24. A method for transferring a workpiece, comprising:
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placing a workpiece on an arm member comprising a tip projection provided at a tip end thereof for contacting a periphery of the workpiece and restricting movement of the workpiece, said arm member further comprising multiple supporting projections protruding from a top surface thereof for contacting and supporting a back side of the workpiece;
moving the arm member with the workpiece supported thereon toward a retracted position;
contacting a periphery of the workpiece with a positioning member at the retracted position by moving the workpiece relative to the arm member whereby the workpiece is sandwiched between the tip projection and the position member; and
moving the arm member with the workpiece supported thereon toward an extended position. - View Dependent Claims (25, 26, 27, 28, 29)
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Specification