Bi-directionally actuated thin membrane mirror
First Claim
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1. A thin membrane deformable mirror, comprising:
- a deformable membrane having a mirrored front face and a back face;
a mirror frame for supporting the deformable membrane;
a set of independently controllable electrodes spaced from the back face of the membrane;
at least one additional electrode spaced from the front face of the membrane; and
means for applying actuating electrical voltages to the set of electrodes, to deform the membrane to a desired surface profile needed to apply wavefront corrections to an optical beam impinging on the mirror, and to the at least one additional electrode, to compensate at least in part for any concave bias in the surface profile resulting from actuation of the set of electrodes.
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Abstract
A deformable membrane mirror and a related method for its use, the mirror including a deformable membrane having a reflective front face and a back face, and further including electrodes located on both sides of the membrane, to provide a desired surface contour without imparting a concave bias to the membrane. The electrodes include a first set of electrodes spaced from the back face of the membrane, and at least one additional electrode spaced from the front face of the membrane.
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Citations
6 Claims
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1. A thin membrane deformable mirror, comprising:
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a deformable membrane having a mirrored front face and a back face;
a mirror frame for supporting the deformable membrane;
a set of independently controllable electrodes spaced from the back face of the membrane;
at least one additional electrode spaced from the front face of the membrane; and
means for applying actuating electrical voltages to the set of electrodes, to deform the membrane to a desired surface profile needed to apply wavefront corrections to an optical beam impinging on the mirror, and to the at least one additional electrode, to compensate at least in part for any concave bias in the surface profile resulting from actuation of the set of electrodes. - View Dependent Claims (2, 3, 4, 5)
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6. A method for deforming a thin membrane deformable mirror, comprising the steps of:
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holding a deformable membrane in a mirror frame, the deformable membrane having a mirrored front face and a back face;
locating a set of electrodes in spaced relation to the back face of the deformable membrane;
locating at least one additional electrode in spaced relation to the front face of the deformable membrane;
applying voltage control signals to the set of electrodes and to the at least one additional electrode; and
deforming the deformable mirror to attain a surface profile to effect wavefront corrections to an optical beam impinging on the mirror, without imposing a concave bias on the surface profile.
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Specification