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System and method for generating pattern data used to control a pattern generator

  • US 20060115752A1
  • Filed: 11/30/2004
  • Published: 06/01/2006
  • Est. Priority Date: 11/30/2004
  • Status: Active Grant
First Claim
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1. A method, comprising:

  • (a) receiving a pattern data set;

    (b) modifying the pattern data set using parameters corresponding to a type of pattern generator being used to pattern a beam of radiation;

    (c) producing a pattern with the pattern generator using the modified pattern data set;

    (d) patterning the beam of radiation with the pattern generator having the pattern from step (c); and

    (e) projecting the patterned beam onto a target portion of an object.

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