Method for forming an improved T-shaped gate structure
First Claim
1. A method of forming a T-shaped gate structure comprising the steps of:
- providing a semiconductor substrate comprising at least one overlying sacrificial layer;
forming an opening through a thickness of the at least one sacrificial layer to expose the semiconductor substrate, said opening comprising a tapered cross section having a wider upper portion compared to a bottom portion; and
, backfilling the opening with a gate electrode material to form a gate structure.
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Abstract
A T-shaped gate structure and method for forming the same the method including providing a semiconductor substrate comprising at least one overlying sacrificial layer; lithographically patterning a resist layer overlying the at least one sacrificial layer for etching an opening; forming the etched opening through a thickness of the at least one sacrificial layer to expose the semiconductor substrate, said etched opening comprising a tapered cross section having a wider upper portion compared to a bottom portion; and, backfilling the etched opening with a gate electrode material to form a gate structure.
26 Citations
24 Claims
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1. A method of forming a T-shaped gate structure comprising the steps of:
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providing a semiconductor substrate comprising at least one overlying sacrificial layer;
forming an opening through a thickness of the at least one sacrificial layer to expose the semiconductor substrate, said opening comprising a tapered cross section having a wider upper portion compared to a bottom portion; and
,backfilling the opening with a gate electrode material to form a gate structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of forming a T-shaped gate structure comprising the steps of:
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providing a semiconductor substrate comprising an overlying silicon oxide layer and a nitride layer overlying the silicon oxide layer;
lithographically patterning a resist layer overlying the nitride layer for etching an opening;
forming the etched opening through a thickness of the nitride and silicon oxide layers to expose the semiconductor substrate, said etched opening comprising a tapered cross section having a wider upper portion compared to a bottom portion;
backfilling the etched opening with a gate dielectric on the semiconductor substrate and a gate electrode material on the gate dielectric;
removing at least the nitride layer to form a gate structure; and
,carrying out an ion implant process to form source and drain regions substantially aligned with the upper portion of the gate structure.
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19. A T-shaped gate structure comprising:
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a gate dielectric on a semiconductor substrate;
a gate electrode on the gate dielectric;
wherein the gate electrode comprises a tapered cross section having a wider upper portion compared to a bottom portion. - View Dependent Claims (20, 21, 22, 23)
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24. A T-shaped gate structure comprising:
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a gate dielectric on a semiconductor substrate;
a gate electrode on the gate dielectric;
wherein the gate electrode comprises a tapered cross section having a wider upper portion compared to a bottom portion; and
,source and drain regions in the semiconductor substrate substantially aligned with the upper portion of the gate electrode.
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Specification