Cleaning with electrically charged aerosols
First Claim
1. A method for processing a workpiece, comprising:
- placing the workpiece into a processing chamber;
forming electrically charged aerosol droplets of a liquid;
directing the electrically charged aerosol droplets to the workpiece;
creating an electrical charge on the surface of the workpiece by allowing the aerosol droplets to collect on the surface of the workpiece; and
with the electrical charge repelling contaminant particles from the surface of the workpiece.
1 Assignment
0 Petitions
Accused Products
Abstract
In a method for cleaning a wafer, the wafer is placed a processing chamber. A layer or film of liquid is provided on the wafer. Electrically charged aerosol droplets of a liquid are formed and directed to the workpiece. The charged aerosol particles accumulate on the workpiece. This creates an electrical charge on the workpiece. Contaminant particles on the workpiece are released and/or repelled by the electrical charge and are carried away in the liquid layer. The liquid layer is optionally continuously replenished with fresh liquid. The liquid layer may be thinned out in a localized aerosol impingement area, via a jet of gas, to allow the electrical charge of the aerosol to better collect on or near the surface of the workpiece.
46 Citations
41 Claims
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1. A method for processing a workpiece, comprising:
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placing the workpiece into a processing chamber;
forming electrically charged aerosol droplets of a liquid;
directing the electrically charged aerosol droplets to the workpiece;
creating an electrical charge on the surface of the workpiece by allowing the aerosol droplets to collect on the surface of the workpiece; and
with the electrical charge repelling contaminant particles from the surface of the workpiece. - View Dependent Claims (2, 3, 4, 7, 8, 9, 11, 12, 14, 16, 17, 19, 24, 25, 26, 28, 29)
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5. (canceled)
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6. (canceled)
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10. (canceled)
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13. (canceled)
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15. (canceled)
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18. (canceled)
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20. (canceled)
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21. (canceled)
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22. (canceled)
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23. (canceled)
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27. (canceled)
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30. A method for processing a workpiece, comprising:
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placing the workpiece into a processing chamber;
forming an electrically charged spray or jet of steam;
directing the electrically charged steam to the workpiece;
creating an electrical charge on the surface of the workpiece by allowing at least some steam to condense on the surface of the workpiece; and
repelling contaminant particles from the surface of the workpiece via the electrical charge created on the surface of the workpiece.
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31. (canceled)
- 32. (canceled)
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35. A system for cleaning a workpiece, comprising:
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means for forming electrically charged aerosol droplets;
means for providing a liquid layer on a surface of the workpiece;
means for reducing the thickness of the liquid layer at a target area on the workpiece; and
means for propelling the electrically charged aerosol droplets at the target area.
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36. A system for cleaning a workpiece, comprising:
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a chamber;
a workpiece holder in the chamber;
an aerosol generator in the chamber;
a liquid supply system for supplying liquid onto the workpiece in the chamber; and
a gas shroud in the chamber moveable relative to the workpiece holder; and
a gas supply connecting to the gas shroud. - View Dependent Claims (37, 38, 39)
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40. (canceled)
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41. (canceled)
Specification