Organic electronic component with high-resolution structuring and method for the production thereof
First Claim
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1. An organic electronic component including a lower layer having a top surface with a spacing I between two adjacent conductor tracks, two adjacent electrodes and/or between a conductor track and an electrode of less than 10 μ
- m in the lower layer, wherein at least one conductor track and/or electrode is arranged in a recess of the lower layer, wherein the recess is produced by a laser, the recess having relatively steep side walls generally perpendicular to the top surface and a bottom surface, the recess exhibiting relatively sharp contours at the junction of the side walls with the bottom recess surface and with the lower layer top surface and a relatively rough bottom surface as compared to the top surface of the lower layer.
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Abstract
The invention concerns an organic electronic component with high-resolution structuring, in particular an organic field effect transistor (OFET) with a small source-drain spacing, and a process for the production thereof. The organic electronic component has recesses in which the conductor tracks/electrodes are arranged and which are burnt in by means of laser in the production procedure.
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8 Claims
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1. An organic electronic component including a lower layer having a top surface with a spacing I between two adjacent conductor tracks, two adjacent electrodes and/or between a conductor track and an electrode of less than 10 μ
- m in the lower layer, wherein at least one conductor track and/or electrode is arranged in a recess of the lower layer, wherein the recess is produced by a laser, the recess having relatively steep side walls generally perpendicular to the top surface and a bottom surface, the recess exhibiting relatively sharp contours at the junction of the side walls with the bottom recess surface and with the lower layer top surface and a relatively rough bottom surface as compared to the top surface of the lower layer.
- 2. A process for the production of an organic electronic component including a substrate or lower layer having a top surface, the process for producing a conductor track and/or an electrode in the substrate or lower layer by burning at least one recess into the lower layer or into the substrate by emitting a laser beam through a mask, wherein said recess has a bottom surface and relatively steep walls relative to the top surface, the recess exhibiting relatively sharp contours between the side walls and bottom surface and between the side walls and the top surface and a rough surface at the bottom surface as compared to the top surface, and then filling the recess in a subsequent process step with conductive, predominantly organic material.
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