Electrostatic/electrostrictive actuation of elastomer structures using compliant electrodes
First Claim
1. A method of actuating an elastomeric structure comprising:
- applying a potential difference between a compliant electrode and a second electrode positioned on opposite sides of a first microfabricated recess of an elastomeric block, such that the compliant electrode is attracted to the second electrode and an associated elastomeric membrane separating the first microfabricated recess from a second microfabricated recess is drawn into the first recess.
1 Assignment
0 Petitions
Accused Products
Abstract
A valve structure comprises an elastomeric block formed with first and second microfabricated recesses separated by a membrane portion of the elastomeric block. The valve is actuated by positioning a compliant electrode on a first side of the first recess proximate to and in physical communication with the membrane. Where the valve is to be electrostatically actuated, a second electrode is positioned on a second side of the first recess opposite the first side. Application of a potential difference across the electrodes causes the compliant electrode and the membrane to be attracted into the flow channel. Where the valve is to be electrostrictively actuated, a second electrode is positioned on the same side of the recess as the compliant electrode. Application of a potential difference across the electrodes causes the electrodes to be attracted such that elastomer membrane portion material between them is compressed and bows into the flow channel. Either of the electrostrictively or the electrostatically-actuated valve structures may include an electrically-conducting fluid in the second recess to serve as the compliant electrode.
-
Citations
9 Claims
-
1. A method of actuating an elastomeric structure comprising:
applying a potential difference between a compliant electrode and a second electrode positioned on opposite sides of a first microfabricated recess of an elastomeric block, such that the compliant electrode is attracted to the second electrode and an associated elastomeric membrane separating the first microfabricated recess from a second microfabricated recess is drawn into the first recess. - View Dependent Claims (2, 3, 6, 7, 8, 9)
- 4. A method of controlling a flow of material in an elastomeric structure comprising applying a potential difference to cause electrostatic actuation of a compliant electrode.
Specification