Metal nano-void photonic crystal for enhanced raman spectroscopy

• US 20060119853A1
• Filed: 11/04/2005
• Published: 06/08/2006
• Est. Priority Date: 11/04/2004
• Status: Active Grant

• Current Assignee: Renishaw Diagnostics Limited (Renishaw PLC)
• Original Assignee: Mesophotonics Limited
• Inventors: Zoorob, Majd, Baumberg, Jeremy, Wilkinson, James, Lincoln, John, Mahnkopf, Sven
• Granted Patent: US 7,483,130 B2
• Time in Patent Office: Days
• US Class Current: 356/445
• CPC Class Codes: G01N 21/658 enhancement Raman, e.g. surface plasmons

Abstract

A planar optical platform for generating a Raman signal from a foreign object comprises an input region and an output region, for receiving and extracting optical radiation, optically coupled to a plasmonic band structure region. The plasmonic band structure region comprises a layer of a first material, having a first refractive index, patterned with an array of sub-regions of a second material, having a second refractive index, wherein a side-wall of each sub-region is coated with a metallodielectric layer. The array of sub-regions gives rise to a plasmonic band structure and, in use, each sub-region confines a plasmon resonance excited by optical radiation coupled into the plasmonic band structure region, which gives rise to a Raman signal from a foreign object placed proximate the plasmonic band structure region. The platform may be incorporated into a spectroscopic measurement system and is particularly useful for surface-enhanced Raman spectroscopy of analyte molecules.

Claims

1. A planar optical platform for generating a Raman signal from a foreign object, comprising:

an input region for receiving optical radiation;

a plasmonic band structure region optically coupled to the input region, the plasmonic band structure region comprising a layer of a first material patterned with an array of sub-regions of a second material, the first material having a first refractive index and the second material having a second refractive index, a side-wall of each sub-region being coated with a metallic or metallodielectric layer, wherein the array of sub-regions give rise to a plasmonic band structure, and wherein, in use, each sub-region confines a plasmon resonance excited by optical radiation coupled into the plasmonic band structure region which gives rise to a Raman signal from a foreign object placed proximate the plasmonic band structure region; and

an output region for extracting optical radiation, the output region optically coupled to the plasmonic band structure region.

2. A platform according to claim 1, wherein an end-wall of each sub-region is coated with a metallodielectric layer.

3. A platform according to claim 1, wherein unpatterned regions of the layer of the first material are coated with a metallodielectric layer.

4. A platform according to claim 1, wherein the sub-regions are located at the vertices of a predefined tiling arrangement selected from a group which includes:

a periodic lattice of square, rectangular or triangular geometry, a quasiperiodic tiling, an amorphous tiling, a graded lattice, a doubly-graded lattice, a superposition of two tiling arrangements and a tiling arrangement possessing single or multiple defect sub-region sites.

5. A platform according to any of claim 1, wherein at least one sub-region comprises a circular or elliptical cylinder having a diameter from 5 nm to about 10,000 nm and a cylinder depth from 1 nm to 10,000 nm.

6. A platform according to any of claim 1, wherein at least one sub-region comprises an inverted polyhedron or an inverted truncated polyhedron having a base length ranging from 50 nm to about 20,000 nm.

7. A platform according to claim 6, wherein at least one sub-region comprises an inverted polyhedron or an inverted truncated polyhedron contiguous with a circular-, elliptical- or polygonal-faced cylinder, the maximum diameter of the cylinder being smaller than the polyhedron base length.

8. A platform according to claim 6, wherein the polyhedron comprises a pyramid.

9. A platform according to claim 1, wherein a transverse extent of each of the sub-regions varies across the array.

10. A platform according to claim 1, wherein the second material comprises air.

11. A platform according claim 1, wherein the first material is selected from a group which includes silicon, silicon dioxide, silicon nitride, silicon oxynitride, tantalum pentoxide, polymer, and a semiconductor material.

12. A platform according to claim 1, wherein the metallic or metallodielectric layer has a thickness of from 1 nm to 500 nm.

13. A platform according to claim 1, wherein the metallic layer or the metallodielectric layer comprises one or more metallic layers comprising a metal selected from a group which includes gold, platinum, silver, copper, palladium, cobalt, iron and nickel.

14. A platform according to claim 1, wherein a surface of the metallic or metallodielectric layer is rough due to the coating fabrication method.

15. A platform according to claim 1, further comprising a multi-layered planar metallodielectric or dielectric structure on which the patterned layer is disposed.

16. A platform according to claim 15, wherein the multi-layered structure comprises one of a planar distributed-Bragg reflector, a planar optical waveguide and a one-dimensional photonic crystal stack.

17. A platform according to claim 15, wherein the multi-layered structure comprises a material selected from a group which includes silicon, silicon dioxide, silicon nitride, silicon oxynitride, tantalum pentoxide, polymer and a semiconductor material.

18. A platform according to any of claim 15, wherein the sub-regions extend though part of the multi-layered structure.

19. A platform according to any of claim 15, wherein the multi-layered structure comprises an air void directly below the sub-regions.

20. A platform according to any of claims 16, wherein the input region comprises a portion of the planar optical waveguide.

21. A platform according to any of claim 1, wherein the input region comprises a portion of the plasmonic band structure region which, in use, diffractively couples optical radiation into the plasmonic band structure region.

22. An optical device comprising a platform according to claim 1 further comprising a processing structure optically-coupled to the plasmonic band structure region for preprocessing optical radiation incident on the platform and coupling the preprocessed radiation to the plasmonic band structure region or a processing structure optically-coupled to the plasmonic band structure region for postprocessing optical radiation coupled from the plasmonic band structure region to the postprocessing structure.

23. An optical device according to claim 22, wherein the processing structure performs one or more functionalities selected from a group which includes polarization filtering, spectral filtering, optical time delay, super-diffraction, beam steering and beam collimation.

24. An optical device according to claim 22, wherein the processing structure is selected from a group which includes a taper coupler, an evanescent coupler, a velocity taper coupler, a grating structure, a one-dimensional photonic crystal, a periodic two-dimensional photonic crystal and a two-dimensional photonic quasicrystal.

25. An optical device according to claim 22, wherein the processing structure is formed integrally with the plasmonic band structure region.

31. A method for fabricating an optical platform according to claim 1, the method comprising the steps of:

epitaxially growing the layer of the first material and any underlying multi-layered structure;

defining a pattern on the layer of the first material;

etching a portion of the epitaxial stucture with an anisotropic etch; and

depositing a metallic or metallodielectric layer.

32. A method according to claim 31, wherein the pattern definition step is selected from a group of techniques which includes photolithography, deep UV lithography, electron beam lithography, interference lithography, imprint or stamping process.

33. A method according to claim 31, wherein the etching step comprises highly anisotropic plasma etching performed using a technique selected from a group which includes reactive ion etching (RIE), electron cyclotron resonance assisted reactive ion etching (ECR-RIE), chemically assisted ion beam etching (CAIBE), and inductive coupled plasma reactive ion etching (ICP-RIE).

34. A method according to claim 31, wherein the etch step comprises highly anisotropic anodic etching.

35. A method according to claim 31, wherein the etching step is highly anisotropic and comprises ion beam milling.

36. A method according to claim 31, wherein the anisotropic etch is a wet etch process using a chemical selected from a group which includes:

EDP (ethylenediamine pyrocatechal), CsOhH, NaOH, N2H4-H2O (Hydrazine) and KOH.

37. A method according to claim 36, wherein the first material is single crystal silicon and the anisotropic etch is terminated when the crystal planes of the Silicon are completely exposed along all the faces of an inverted polyhedron.

38. A method according to claim 31, further comprising an additional wet etch step, wherein the additional step also uses a chemical selected from a group which includes:

EDP (ethylenediamine pyrocatechal), CsOhH, NaOH, N2H4-H2O (Hydrazine) and KOH.

39. A method according to claims 31, wherein the metal deposition step is performed using a technique selected from a group which includes physical vapour deposition (PVD), evaporation deposition, chemical vapour deposition (CVD), and atomic layer deposition (ALD).

26. An optical system for performing Raman spectroscopy on a foreign object comprising;

an optical source;

an optical platform for generating a Raman signal from a foreign object, comprising;

an input region for receiving optical radiation,

a plasmonic band structure region optically coupled to the input region, the plasmonic band structure region comprising a layer of a first material patterned with an array of sub-regions of a second material, the first material having a first refractive index and the second material having a second refractive index, a side-wall of each sub-region being coated with a metallic or metallodielectric layer, wherein the array of sub-regions give rise to a plasmonic band structure, and wherein, in use, each sub-region confines a plasmon resonance excited by optical radiation coupled into the plasmonic band structure region which gives rise to a Raman signal from a foreign object placed proximate the plasmonic band structure region, and

an output region for extracting optical radiation, the output region optically

coupled to the plasmonic band structure region, the optical platform optically coupled to the optical source; and

an optical detector optically coupled to the optical platform for detecting a Raman signal generated when the foreign object is placed proximate the plasmonic band structure region into which radiation from the optical source is coupled.

27. A method for obtaining a Raman or surface enhanced Raman spectrum from a sample foreign object, the method comprising the steps of:

locating the sample foreign object proximate the plasmonic band structure region of an optical platform, wherein the platform comprises

an input region for receiving optical radiation,

a plasmonic band structure region optically coupled to the input region, the plasmonic band structure region comprising a layer of a first material patterned with an array of sub-regions of a second material, the first material having a first refractive index and the second material having a second refractive index, a side-wall of each sub-region being coated with a metallic or metallodielectric layer, wherein the array of sub-regions give rise to a plasmonic band structure, and wherein, in use, each sub-region confines a plasmon resonance excited by optical radiation coupled into the plasmonic band structure region which gives rise to a Raman signal from a foreign object placed proximate the plasmonic band structure region, and

an output region for extracting optical radiation, the output region optically coupled to the plasmonic band structure region, the optical platform optically coupled to the optical source;

activating an optical source generating optical radiation optimised for excitation of surface plasmons, an optimised parameter for said radiation selected from a group which includes wavelength, azimuthal and polar angles, and polarization state;

coupling the optical radiation into the plasmonic band structure region; and

,

detecting a spectrum of a Raman signal emerging from the optical platform

28. A method according to claim 27, wherein the step of locating the foreign object comprises flowing the foreign object in a fluid in the vicinity of the plasmonic band structure region.

29. A method according to claim 28, wherein the foreign object comprises a molecule of an analyte selected from a bio-chemical group which includes chemical warfare agents, pesticides, urea, lactic acid, pollutants, ascorbate, glucose, or a biomolecule selected from a group which includes proteins, lipids, nucleic acids such as bacterial and viral DNA, RNA, PNA, and biological cells such as cancer cells.

30. A method according to claim 29, wherein the foreign object is located within 50 nm of one of the sub-regions in the plasmonic band structure region.