Light modulator device
First Claim
Patent Images
1. A light modulator device, comprising:
- a bottom charge plate;
a pixel plate including a reflective top surface supported by a plurality of flexures, wherein said plurality of flexures are located substantially below said reflective top surface, wherein each of said flexures includes a span portion and a pixel plate mounting portion, and each of said span portions is coupled to a base mounting portion adjacent to the bottom charge plate; and
a top plate separated from the pixel plate by an optical gap.
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Abstract
A light modulator device includes a bottom charge plate; a pixel plate supported by at least one flexure, wherein the flexure is located substantially below said pixel plate, and a top charge plate.
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Citations
41 Claims
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1. A light modulator device, comprising:
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a bottom charge plate;
a pixel plate including a reflective top surface supported by a plurality of flexures, wherein said plurality of flexures are located substantially below said reflective top surface, wherein each of said flexures includes a span portion and a pixel plate mounting portion, and each of said span portions is coupled to a base mounting portion adjacent to the bottom charge plate; and
a top plate separated from the pixel plate by an optical gap. - View Dependent Claims (2, 3, 4, 5, 8, 13, 15, 16, 17, 18, 19, 23)
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6. A light modulator device, comprising:
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a bottom charge plate;
a pixel plate including a reflective top surface supported by at least one flexure, wherein said flexure is located substantially below said reflective top surface, wherein said pixel plate includes at least one bump formed on an underside of said pixel plate, wherein said flexure comprises a base mounting post and said bump is formed near said base mounting post; and
a top plate separated from the pixel plate by an optical gap;
wherein an electrostatic gap is defined between said pixel plate and said bottom charge plate wherein the electrostatic gap includes a first sacrificial space between said bottom charge plate and a flexure space between said flexure and said pixel plate, and wherein said first sacrificial space is larger than said flexure space. - View Dependent Claims (7)
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9. A light modulator device, comprising:
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a bottom charge plate;
a pixel plate including a reflective top surface supported by at least one flexure, wherein said at least one flexure is located substantially below said reflective top surface, wherein said at least one flexure has at least one bump formed on an underside of said flexure; and
a top plate separated from the pixel plate by an optical gap;
wherein an electrostatic gap is defined between said pixel plate and said bottom charge plate wherein the electrostatic gap includes a first sacrificial space between said bottom charge plate and a flexure space between said at least one flexure and said pixel plate, and wherein said first sacrificial space is smaller than said flexure space. - View Dependent Claims (10)
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11. -12. (canceled)
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14. (canceled)
- 20. The light modulator device of claim, and further comprising a plurality of first source connections, a plurality of second source connections, and a bottom oxide layer, said first source connections being coupled to said bottom charge plate and said second source connections being coupled to said pixel plate.
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24. -32. (canceled)
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33. A light modulator device, comprising:
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a bottom charge plate;
a pixel plate supported by a plurality of flexures, wherein said plurality of flexures are located substantially below said pixel plate and wherein the pixel plate includes at least one bump formed on an underside of the pixel plate and the each of the plurality of flexures includes a base mounting post and the at least one bump is formed near the base mounting post;
a top plate;
a charge gap defined between said bottom charge plate and said pixel plate;
a flexure space less than the charge gap defined between the plurality of flexures and the pixel plate; and
an optical gap and electrical gap defined between said top plate and said pixel plate. - View Dependent Claims (34, 35, 36, 37, 38)
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39. A method of forming a light modulator device, comprising:
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forming a bottom charge plate;
forming a first sacrificial layer on said bottom charge plate;
forming flexures on said first sacrificial layer wherein said flexures include a base mounting post;
forming a pixel plate above said flexures wherein the pixel plate includes at least one bump formed on an underside of said pixel plate and near one of said base mounting post; and
removing said first sacrificial layer such that said flexures are substantially below said pixel plate. - View Dependent Claims (40)
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41. -54. (canceled)
Specification