System for controlling a volume of material on a mold
First Claim
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1. A system for controlling a volume of liquid on a mold, said system comprising:
- a body defining a void with an aperture formed into said body and positioned proximate to said mold; and
a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold.
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Abstract
A system for controlling a volume of liquid on a mold that features a body defining a volume with an aperture formed into the body and positioned proximate to the mold. A pump system is in fluid communication with the body, and the aperture and the pump system are established to create a stream of fluid moving between the mold and the volume. In this manner a quantity of fluid is removed while retained upon the mold is a desired portion of the fluid to undertake imprint lithographic processes.
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Citations
20 Claims
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1. A system for controlling a volume of liquid on a mold, said system comprising:
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a body defining a void with an aperture formed into said body and positioned proximate to said mold; and
a pump system in fluid communication with said body, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A system for controlling a volume of liquid on a mold, said system comprising:
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a body defining a void with an aperture formed into said body and positioned proximate to said mold to place said void in fluid communication with said mold, with an air bearing being disposed at each end of said aperture, defining a pair of spaced-apart air bearings; and
a pump system in fluid communication with said aperture and said pair of spaced-apart air bearings, with said aperture and said pump system being established to create a stream of fluid moving between said mold and said void to remove a quantity of said fluid while maintaining a portion of said fluid upon said mold and each of said pair of spaced-apart air bearings including an air bearing element comprising a plurality of volumes having dimensions established to be maintained at differing pressure levels. - View Dependent Claims (11, 12, 13, 14)
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15. A system for controlling a volume of liquid on a mold, said system comprising:
a body defining a void with an aperture formed into said body and positioned proximate to said mold to place said void in fluid communication with an ambient, with an air bearing being disposed at each end of said aperture, defining a pair of spaced-apart air bearings each of which includes an air bearing element comprising a plurality of recessed areas of a surface separated by lands. - View Dependent Claims (16, 17, 18, 19, 20)
Specification