MASK, METHOD OF MANUFACTURING MASK, AND LITHOGRAPHIC PROCESS
First Claim
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1. A mask of a lithographic process, comprising:
- a substrate;
a first polarization layer for allowing a transmission of a first polarization direction of light and avoiding a transmission of a second polarization direction of light;
a second polarization layer for avoiding a transmission of the first polarization direction of light, wherein the second polarization layer is patterned with a predetermined pattern.
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Abstract
A mask of a lithographic process, a method of manufacturing the mask and a lithographic process by using the mask are provided. The mask includes a substrate, a first polarization layer and a second polarization layer is provided. The first polarization layer for allowing a transmission of a first polarization direction of light and avoiding a transmission of a second polarization direction of light. The second polarization layer for avoiding a transmission of the first polarization direction of light, wherein the second polarization layer is patterned with a predetermined pattern.
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Citations
26 Claims
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1. A mask of a lithographic process, comprising:
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a substrate;
a first polarization layer for allowing a transmission of a first polarization direction of light and avoiding a transmission of a second polarization direction of light;
a second polarization layer for avoiding a transmission of the first polarization direction of light, wherein the second polarization layer is patterned with a predetermined pattern. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of manufacturing a mask of a lithographic process, comprising:
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providing a substrate;
forming a first polarization layer over the substrate;
forming a second polarization layer over the etch stop layer; and
patterning the second polarization layer with a predetermined pattern;
wherein the first polarization layer is adopted for allowing a transmission of a first polarization direction of light and avoiding a transmission of a second polarization direction of light, and the second polarization layer is adopted for avoiding a transmission of the first polarization direction of light. - View Dependent Claims (9, 10, 11, 12, 13, 14, 15)
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16. A lithographic process, comprising:
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providing an incident light;
providing a mask, wherein the mask comprising;
a substrate;
a first polarization layer for allowing a transmission of a first polarization direction of the incident light and avoiding a transmission of a second polarization direction of the incident light;
a second polarization layer for avoiding a transmission of the first polarization direction of the incident light, wherein the second polarization layer is patterned with a predetermined pattern. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26)
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Specification