Method for fast filling of templates for imprint lithography using on template dispense

• US 20060121728A1
• Filed: 04/07/2005
• Published: 06/08/2006
• Est. Priority Date: 12/07/2004
• Status: Active Grant

• Current Assignee: Mii Newco, Inc.
• Original Assignee: Molecular Imprints, Inc. (Canon Inc.)
• Inventors: Lad, Pankaj B., Truskett, Van N., McMackin, Ian M.
• Granted Patent: US 7,811,505 B2
• Time in Patent Office: Days
• US Class Current: 438/637
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: G03F 7/0002 Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
• CPC Class Codes: Y10S 977/887 Nanoimprint lithography, i.e. nanostamp

Abstract

A method of depositing material upon a substrate features filling recesses of a substrate with liquid and removing material present on the substrate, outside of the recesses using fluid, i.e., apply a vacuum of a jet of fluid. To that end, one method of the present invention includes depositing a measure of liquid upon a surface of a substrate having a recess formed therein to ingress into a volume of the recess with a portion of the liquid. A quantity of the liquid is disposed upon regions of the surface proximate to the recess. Thereafter, the quantity of liquid is removed while maintaining the portion within the volume. In this manner, the portion may be transferred onto an additional substrate. More specifically, the portion may be placed in contact with a layer of flowable material and cross-linking therewith by exposing the liquid and the flowable material to actinic radiation.

Claims

1. A method of depositing material upon a template, employing a featured mold having a recess formed into a surface thereof, said method comprising:

depositing a measure of liquid upon said surface to ingress into a volume of said recess with a portion of said liquid, a quantity of said liquid being disposed upon regions of said surface proximate to said recess; and

removing said quantity, while maintaining said portion within said volume.

2. The method as recited in claim 1 wherein depositing further includes filling said volume with said portion.

3. The method as recited in claim 1 wherein removing further includes applying a vacuum to said quantity.

4. The method as recited in claim 1 wherein removing further includes exposing said measure of liquid to a sheet of a fluid.

5. The method as recited in claim 1 wherein said measure is greater than said volume.

6. The method as recited in claim 1 further including transferring said portion onto a substrate.

7. The method as recited in claim 1 further including placing said portion in contact with a layer of flowable material and cross-linking said liquid with said flowable material.

8. The method as recited in claim 7 wherein cross-linking further includes exposing said liquid and said flowable material to actinic radiation.

9. The method as recited in claim 7 wherein said liquid and said flowable material are polymerizable and cross-linkable in response to actinic radiation.

10. A method of depositing material upon a template, employing a featured mold having a recess formed into a surface thereof, said method comprising:

depositing a measure of liquid upon said surface to fill a volume of said recess with a portion of said liquid, a quantity of said liquid being disposed upon regions of said surface proximate to said recess; and

removing said quantity, while maintaining said portion within said volume.

11. The method as recited in claim 10 further including transferring said portion onto a substrate.

12. The method as recited in claim 10 wherein depositing further includes filling said volume with said portion.

13. The method as recited in claim 10 wherein removing further includes applying a vacuum to said quantity.

14. The method as recited in claim 10 wherein removing further includes exposing said measure of liquid to a sheet of a fluid.

15. The method as recited in claim 10 wherein said measure is greater than said volume.

16. The method as recited in claim 10 further including placing said portion in contact with a layer of flowable material and cross-linking said liquid with said flowable material by exposing said liquid and said flowable material to actinic radiation.

17. A method of depositing material upon a template, employing a featured mold having a recess formed into a surface thereof, said method comprising:

filling said recess with a volume of a liquid with regions of said surface proximate to said recess having a quantity of said liquid disposed thereon; and

removing said quantity, while maintaining said volume within said recess.

18. The method as recited in claim 17 further including placing said volume in contact with a layer of flowable material and cross-linking said liquid with said flowable material by exposing said liquid and said flowable material to actinic radiation.

19. The method as recited in claim 18 wherein removing further includes applying a vacuum to said quantity.

20. The method as recited in claim 18 wherein removing further includes exposing said quantity to a sheet of a fluid.