Method for calibrating semiconductor test instruments
First Claim
1. A method for calibrating a semiconductor test instrument for performing timing calibration of a semiconductor test instrument having drivers for generating signals synchronizing with clock signals and comparators for performing comparisons synchronizing with strobe signals, comprising:
- a first step of adjusting phases of one of said clock signals and said strobe signals, both of which are set in one-to-one correspondence, on the basis of the other while each of said drivers corresponds to each of said comparators;
a second step of obtaining relative phase differences between said clock signals corresponding to said drivers respectively or relative phase differences between said strobe signals corresponding to said comparators respectively; and
a third step of adjusting phases of said clock signals and phases of said strobe signals in accordance with said relative phase differences.
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Abstract
A method for calibrating a semiconductor test instrument leading cost reduction, simplified work, and short working time. Drivers are related to comparators in one-to-one correspondence. A clock signal and a strobe signal have a one-to-one correspondence. The phase of either a clock signal or a strobe signal is adjusted with reference to the phase of the other signal. The relative phase difference between clock signals or between strobe signals are determined. The phases of the clock and strobe signals are adjusted with reference to the relative phase difference.
20 Citations
16 Claims
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1. A method for calibrating a semiconductor test instrument for performing timing calibration of a semiconductor test instrument having drivers for generating signals synchronizing with clock signals and comparators for performing comparisons synchronizing with strobe signals, comprising:
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a first step of adjusting phases of one of said clock signals and said strobe signals, both of which are set in one-to-one correspondence, on the basis of the other while each of said drivers corresponds to each of said comparators;
a second step of obtaining relative phase differences between said clock signals corresponding to said drivers respectively or relative phase differences between said strobe signals corresponding to said comparators respectively; and
a third step of adjusting phases of said clock signals and phases of said strobe signals in accordance with said relative phase differences. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16-84. -84. (canceled)
Specification