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Wafer bonding of micro-electro mechanical systems to active circuitry

  • US 20060128058A1
  • Filed: 12/15/2004
  • Published: 06/15/2006
  • Est. Priority Date: 12/15/2004
  • Status: Active Grant
First Claim
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1. A single integrated wafer package comprising:

  • a micro electromechanical system (MEMS) wafer with a first surface, the MEMS wafer having at least one MEMS component on its first surface;

    an active device wafer with a first surface, the active device wafer having an active device circuit on its first surface;

    a seal ring adjacent the first surface of the MEMS wafer such that a seal is formed about the MEMS component; and

    an external contact to the wafer package, wherein the external contact accessible externally to the wafer package and is electrically coupled to the active device circuit of the active device wafer.

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