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Force or pressure sensor and method for applying the same

  • US 20060129047A1
  • Filed: 08/15/2003
  • Published: 06/15/2006
  • Est. Priority Date: 08/21/2002
  • Status: Active Grant
First Claim
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1. A force or pressure sensor, comprising a substantially rigid, mechanical-load resistant frame, a flexible diaphragm secured over its peripheral rim to the frame and a piezoelectric sensor diaphragm applied to the surface of the flexible diaphragm wherein the sensor diaphragm loading element comprises a substantially rigid cover capable of carrying mechanical loading of more than 50 kg, wherein the cover includes a protrusion or shoulder, bearing against a middle section of the flexible diaphragm and thus, by deflection, prestressing the flexible diaphragm and the piezoelectric sensor diaphragm attached thereto, and wherein the frame and the cover define therebetween a closed housing chamber, the flexible diaphragm and the piezoelectric sensor diaphragm being located thereinside.

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