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Susceptor for apparatus fabricating thin film

  • US 20060130764A1
  • Filed: 12/16/2005
  • Published: 06/22/2006
  • Est. Priority Date: 12/16/2004
  • Status: Abandoned Application
First Claim
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1. A susceptor for an apparatus fabricating a thin film on a substrate, comprising:

  • a body supported by a supporter therebelow;

    a laying groove at a top surface of the body;

    a temperature adjuster in the laying groove; and

    a cover covering the laying groove.

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