Susceptor for apparatus fabricating thin film

• US 20060130764A1
• Filed: 12/16/2005
• Published: 06/22/2006
• Est. Priority Date: 12/16/2004
• Status: Abandoned Application

• Current Assignee: Jusung Engineering Company Limited
• Original Assignee: Jusung Engineering Company Limited
• Inventors: Quan, Yong-Chun
• Application Number:
  US11/305,389
• Publication Number:
  US 20060130764A1
• Time in Patent Office: Days
• US Class Current: 118/725
• CPC Class Codes: C23C 16/4586 Elements in the interior of the support, e.g. electrodes, heating or cooling devices

Abstract

A susceptor for an apparatus fabricating a thin film on a substrate includes a body supported by a supporter therebelow; a laying groove at a top surface of the body; a temperature adjuster in the laying groove; and a cover covering the laying groove.

Claims

1. A susceptor for an apparatus fabricating a thin film on a substrate, comprising:

a body supported by a supporter therebelow;

a laying groove at a top surface of the body;

a temperature adjuster in the laying groove; and

a cover covering the laying groove.

2. The susceptor according to claim 1, wherein the temperature adjuster includes a heater.

3. The susceptor according to claim 1, wherein the cover is welded to the body.

4. The susceptor according to claim 1, wherein the body is a first body and further comprising a second body disposed on and coupled to the first body.

5. The susceptor according to claim 4, wherein the first and second bodies are made of the same material.

6. The susceptor according to claim 4, wherein side portions of the first and second bodies are coupled by welding.

7. The susceptor according to claim 4, wherein the first and second bodies include first and second coupling members corresponding to each other, respectively.

8. The susceptor according to claim 7, wherein one of the first and second coupling members includes a coupling protrusion, and the other of the first and second coupling members includes a coupling hollow.

9. The susceptor according to claim 7, wherein one of the first and second coupling members includes a coupling protrusion, and the other of the first and second coupling members includes a coupling through-hole.

10. The susceptor according to claim 9, wherein the coupling protrusion has a lift pin hole therein receiving a lift pin.

11. The susceptor according to claim 9, wherein the coupling protrusion is welded to one of the first and second bodies having the corresponding coupling through-hole.

12. The susceptor according to claim 3, wherein the welding portion is even.

13. A susceptor for an apparatus fabricating a thin film on a substrate, comprising:

a first body supported by a supporter therebelow;

a second body disposed on and coupled to the first body;

a laying groove at one of coupling surfaces of the first and second bodies;

a temperature adjuster in the laying groove; and

a cover covering the laying groove.